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Patent US4829179 - Surface analyzer - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More »Sign inPatentsA surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are...http://www.google.com/patents/US4829179?utm_source=gb-gplus-sharePatent US4829179 - Surface analyzerAdvanced Patent SearchTry the new Google Patents, with machine-classified Google Scholar results, and Japanese and South Korean patents.Publication numberUS4829179 APublication typeGrantApplication numberUS 07/070,252Publication dateMay 9, 1989Filing dateJul 6, 1987Priority dateJul 12, 1986Fee statusPaidAlso published asDE3781963D1, DE3781963T2, EP0253336A2, EP0253336A3, EP0253336B1Publication number070252, 07070252, US 4829179 A, US 4829179A, US-A-4829179, US4829179 A, US4829179AInventorsMasahiko Aoki, Masashi Konishi, Yasuhiro Matsuda, Naoto OkazakiOriginal AssigneeNissin Electric Company, LimitedExport CitationBiBTeX, EndNote, RefManPatent Citations (9), Referenced by (5), Classifications (19), Legal Events (5) External Links: USPTO, USPTO Assignment, EspacenetSurface analyzer
US 4829179 AAbstract
A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
1. A surface analyzer for analyzing physical properties of the surface of a sample, said surface analyzer comprising:an ion beam source of generation ion beams; deflecting means comprising a first deflecting magnet and second deflecting magnet, said first deflecting magnet for deflecting said ion beams from said ion beam source. to irradiate the surface of said sample with said deflected ion beams in a direction perpendicular to said surface of said sample, and for deflecting scattered ion beams form said sample to said analyzer through use of said second deflecting magnet; accelerating and decelerating means in line with said first and second deflecting magnets, for accelerating said ion beams before said ion beam impinge on said sample and decelerating said scattered ion beams from said sample; and analyzing means for detecting said scattered beams and analyzing an energy loss of said ion beams. 2. A surface analyzer for analyzing physical properties of the surface of a sample, said surface analyzer comprising:an ion beam source for generation ion beams; deflecting means comprising a first deflecting magnet and a second deflecting magnet, said first deflecting magnet for deflecting said ion beams from said ion beam source, for irradiating the surface of said sample with said deflected ion beams in a direction perpendicular to said surface of said sample, and for deflecting scattered ion beams from said sample to said analyzer through use of said second deflecting magnet; accelerating an decelerating means in line with said first and second deflecting magnets for accelerating said ion beams before said ion beams impinge on said sample and decelerting said ion beams from said sample; and analyzing means for detecting said scattered ion beams and analyzing an energy loss of said ion beams; wherein said first deflecting magnet is disposed between said ion beam source and said sample for deflecting said ion beam prior to impingement thereof on said sample and for deflecting said scattered ion beams from said sample, and said second deflecting magnet being disposed between said sample and said analyzing means for deflecting said scattered ion beams from said sample to said analyzing means. 3. The surface analyzer as claimed in claim 2, wherein said second deflecting magnet is positioned so as to deflect as scattered ion beams from said sample in the same direction as said first deflecting magnet.
4. The surface analyzer as claimed in claim 3, wherein said accelerating and decelerating means comprises accelerating means and decelerating means, said accelerating means being disposed between said ion beam source and said first deflecting magnet for accelerating said ion beams from said ion beam source and said decelerating means being located between said second deflecting magnet and said analyzing means for decelerating said scattered ion beams from said second deflecting magnet.
5. The surface analyzer as claimed in claim 3, wherein said accelerating and decelerating means is located between said first deflecting magnet and said sample for both accelerating said ion beams from said first deflecting magnet and decelerating said scattered ion beams from said sample.
6. The surface analyzer as claimed claims 4 or 5, wherein said first and second deflecting magnets are designed so as to satisfy the following equation, Φ1 =Φ1, α1 =α2 =(Φ1 /2)-90 (degrees), and r1 =r2, where Φ1 is the angle of deflection of said scattered ion beams in said first deflecting magnet, α1 is the angle at which said scattered ion beams emerge from said first deflecting magnet, r1 is the radius of curvature of a scattered ion beam with no energy loss in said first deflecting magnet, Φ2 is the angle of deflection of said scattered ion beams in said second deflecting magnet, α2 is the angle at which said scattered beam with no energy loss is admitted into said second deflecting magnet, and r2 is the radius of curvature of a scattered beam with no energy loss in the second deflecting magnet.
7. A surface analyzer for analyzing physical properties of a surface of a sample, said surface analyzer comprising:an ion beam source for generating ion beams; deflecting means comprising a plurality of deflecting magnets for deflecting said ion beams from said ion beam source, for irradiating the surface of said sample with said deflected ion beams in a direction perpendicular to said surface of said sample, and for deflecting scattered ion beams from said sample to said analyzer; accelerating and decelerating means in line with said plurality of deflecting magnets for accelerating said ion beams before said ion beams impinge on said sample and decelerating said scattered ion beams from said sample; and analyzing means for detecting said scattered ion beams and analyzing an energy loss of said ion beams; wherein said plurality of deflecting magnets are disposed between said sample and said analyzing means for deflecting said scattered ion beams from said sample and leading to said analyzing means with said scattered ion beams being parallel to one another on the same plane. 8. The surface analyzer as claimed in claim 7, wherein said analyzing means comprises an elongated slit for passing therethrough said parallel ion beams and a broad position detector for detecting said parallel ion beams passed through said slit.
9. The surface analyzer as claimed in claim 8, wherein said plurality of deflecting magnets included a first deflecting magnet designed in such a manner that said scattered ion beams enter said first deflecting magnet at a first point and emerge from said first deflecting magnet at a plurality of second points, said first point and said plurality of second points lying on the same straight line, and wherein a reference beam plane comprises said parallel ion beams from first deflecting magnet formed of said scattered ion beams pass through said slit while said parallel ion beams intersect said slit at right angles.
10. The surface analyzer as claimed in claim 9, wherein said analyzing means further comprises a mask having a cutout whose contour follows the focus of predetermined ion beams to be detected in said position detector, said mask being placed over said position detector to prevent ion beams other than said predetermined ion beams from being detected by said position detector.
11. The surface analyzer as claimed in claim 7, wherein said deflecting magnets are positioned so as to deflect said scattered ion beams within the range from 45° to 135°.
12. The surface analyzer as claimed in claim 7, wherein said ion beam source comprises a source of proton beams.
The present invention relates to a surface analyzer that employs the technique of PELS (proton energy loss spectroscopy), in which a sample to be analyzed is irradiated by accelerated ion beams such as proton beams, and the beams scattered from the top few layers of the sample are decelerated by passage through a deceleration tube, and the energies of the decelerated scattered beams are measured to analyze physical properties of the surface of the sample.
A brief explanation of the basical principle of the PELS and a conventional surface analyzer employing PELS will be made hereinafter with reference to the accompanying drawings.
Suppose a proton of mass number m, moving with velocity U hits an atom of mass number M at rest at point O in FIG. 1. After collision, the proton glances off at velocity V along a path deflected from its original path by a scattering angle θ while the atom M recoils at velocity W in another direction at a scattering angle Φ. Unlike electrons, the proton is heavy enough to impart motion to atom M and loses energy.
Since momentum is conserved in both x- and y-directions, the following two equations are established:
mU=mVcosθ+MWcosΦ                                 (1)
O=mVsinθ-MWcosΦ                                  (2)
If the collision is completely elastic, kinetic energy is conserved so that: ##EQU1## Eliminating W from Eqs. (1) to (3), ##EQU2## The plus sign in Eq. (5) indicated scattering at angle θ and the minus sign indicates scattering in opposite direction. Since this direction is attained by subtracting θ from π, only the plus sign should be taken in Eq. (5). It should also be noted that in Eq. (5) Γ is defined as follows: ##EQU3##
If the kinetic energy of the proton before collision is written as E0, ##EQU4## After collision, the kinetic energy of the proton is reduced to Ea. If the coefficient of attenuation K is defined as:
Ea=KE0                                                ( 8)
the following equation is obtained: ##EQU5## Eq. (9) is the formula for the energy of a proton scattered at angle θ. This energy is dependent on θ but only to a small extent. In other words, Ea need not be measured for all values of θ and it suffices to measure Ea for a single value of θ after scattering of the proton. The atom with which the proton has collided can be specified by the parameter Γ. In Eq. (9), θ is not a variable but fixed.
A scattered proton at angle θ then enters an analyzer in which a voltage V0 is applied between two parallel plates. A proton entering the analyzer through a slit will travel along a parabolic path and fall into either one of the channels in a micro channel plate.
The distance, L, from the slit and the falling position of the proton is increased as the energy of the proton increases. In other words, the energy of a proton Ea can be determined by measuring L.
If the charge on a proton is written as ze, the proton in the space of the analyzer will receive a force zeV0 /h in a direction perpendicular to the plates which are spaced apart by h.
The velocity of the proton travelling through the analyzer is divided into two components, one being longitudinal and the other being transversal (i.e., perpendicular to the plates). The speed of the longitudinal component u is constant and that of the transversal component v varies. The proton passing through the slit will form a constant angle Ψ with the surface of the nearer plate. The three parameters, u, v and Ψ, can be correlated by the following equations: ##EQU6## These kinetic equations are equivalent to those expressing the motion of an object thrown outwards under gravity.
From Eqs. (26) and (27), the distance L over which the proton travels in the analyzer in a direction parallel to the plates can be calculated as: ##EQU7## The highest resolution is attained when Ψ=45°. Eq. (28) shows that the distance L from the slit to the falling position of the proton is proportional to the energy of the proton Ea. Therefore, the distribution of Ea, or the energy of proton, can be determined based on measurement of L.
In FIG. 2 showing the general layout of a prior art surface analyzer that employs PELS, ion beams such as proton beams extracted from an ionization source 2 are accelerated by an accelerating tube 6 and are optionally converged by a converging unit 8. Subsequently, the beams are deflected by a magnet for mass separation. After deflection, the ion beams impinge on a sample (not shown) in a scattering chamber 14. In order to irradiate a selected area of the sample by the ion beams, a slit (not shown) with a diameter of about 1 mmΦ is provided on the beam line preceding the entrance of ion beams into the scattering chamber 14. If He and other elements are used as sources of ion beams, not only monovalent but also divalent ions may be scattered from the sample, thereby increasing the complexity of measurement, so in the actual operation protons that exist only in the form of monovalent are employed ions. In FIG. 2, the numeral 12 denotes a vacuum pump.
The ion beams impinging on the sample are scattered by the top few layers of the sample. The scattered beams generally have varying values of energy and in order to reduce this spread of energy, a slit (not shown) of about 2 mmΦ is provided on the transport line of the scattered beams. The scattered beams passing through this slit are decelerated by a decelerating tube 18 and their energy spectrum is analyzed with a measuring instrument 20.
The method for determining the potential of the decelerated ion beams is hereunder described by referring to both FIGS. 2 and 3. Suppose that the ion beams are extracted from the ionization source 2 at a voltage of Ve, that the extracted ion beams are accelerated in the accelerating tube 6 by a voltage of V, and that the scattering chamber 14 has a zero potential assuming that it is grounded. Then, the total acceleration voltage of the ion beams, Va, is equal to the sum of V and Ve. If a table 19 (insulated from the ground) for mounting the measuring instrument 20 has a potential of Vd that is equal to Va minus an offset voltage Vo (that is, if the deceleration voltage Vd of the decelerating tube 18 is equal to Va-Vo), the scattered beams that enter the measuring instrument 20 after deceleration have an energy of q×Vo (eV) (disregarding the energy loss that occurs when the beam hit the sample) where q is the unit charge on an ion, for example, a proton.
The accelerating energy of the ion beams by which the sample is to be irradiated is preferably high for various reasons among which the principal one is that highly energized ion beams have a low probability of neutralization. The ion beams typically have an accelerating energy of about 100 keV. On the other hand, the scattered beams preferably have a low energy for the purpose of achieving high-precision measurement of their energy spectra. In a typical case, the scattered ions are decelerated to less than about 1 keV.
Based on the measurement of the energy spectra of the thus decelerated scattered beams; the crystalline structure and other physical properties of the surface of a solid sample can be investigated. By referring to FIG. 4, if the ion beam 3 loses an energy of ΔE because of collision with the sample 15 and if the scattered beam 4 entering the measuring instrument 20 has an energy of E, then the following relationship holds good:
ΔE=qVo-E                                             (10)
because the energy E of the scattered beam 4 entering the measuring instrument 20 is expressed as:
E=qVa-ΔE-q(Va-Vo)                                    (11)
which can be rewritten as Eq. (10).
The measuring instrument 20 shown in FIG. 4 consists of an energy analyzer 21 and a detector 22 such as a channeltron. Writing VESA for the voltage applied to the energy analyzer 21, the energy E can also be expressed as follows:
E=kqVESA                                              ( 12)
As can be seen from Eqs. (10) and (12), the spectrum of energy loss can be determined by varying either the offset voltage Vo or the voltage VESA. Consider here the beams that are scattered by atoms in the top three monolayers of a sample; the beams scattered in the second and third top layers travel a longer distance in lattices than the beams scattered in the topmost layer and hence undergo more energy loss ΔE, yielding a spectrum of the shape shown in FIG. 5.
In the conventional PELS equipment, the scattering angle θ (see FIG. 4) can only be set to a small angle, for example, below 10° for the following two reasons: as the scattering angle is increased from 0°, the solid angle θ of a scattered beam 4 is decreased to lower the efficiency of beam detection; secondly, if the scattering angle θ is too large, individual parts of the equipment will mechanically interfere with one another. However, if the scattering angle θ is below 10°, low scattering approach has the disadvantage that it is highly susceptible to the surface state of a sample to be analyzed and undergo "energy straggling" due to double scattering caused by the asperities on the sample, and energy spectra of the scattered beams become too broad to guarantee a very high precision of analysis.
If one wants to measure the origin of energy loss (i.e., the point at which a scattered beam 4 of ΔE=0 enters the measuring instrument 20) or the energy resolving power of the equipment by admitting the ion beams 3 directly into the instrument 20 without allowing them to be scattered by the sample 15, it is necessary to modify the connection of the beam transport line and other parts of the equipment subsequent to the scattering chamber 14 in such a manner that the scattering angle θ will be 0°. This reconnecting operation and subsequent jobs for achieving alignment are highly time-consuming. In addition, the reassembled equipment may not guarantee the same level of precision as achieved before.
Furthermore, Eq. (9) shows the in the neighborhood of θ≅0, k does not vary with Γ, so that one value of Γ can not be easily distinguished from another.
As a result of their close studies conducted to know the relationship between the scattering angle θ and the solid angle of scattered beams 4, the present inventors found that by setting the scattering angle θ for a value of approximately 180°, a sharp energy spectrum could be obtained for scattered beams while achieving a significant improvement in the efficiency of beam detection.
Therefore, an object of the present invention is to provide a surface analyzer that is capable of not only easily obtaining a sharp energy spectrum for scattered beams and a high efficiency of beam detection but also the measurements of the origin of energy loss and the energy resolution, by setting a scattering angle to approximately 180°.
This object can be achieved by the surface analyzer of the present invention characterized by including a first deflecting magnet that deflects both an ion beam to impinge on a sample and a scattered beam from the sample and which is provided on the path of the two beams, and a second deflecting magnet that is provided on the path of a scattered beam passing through the first deflecting magnet and which deflects said scattered beam in the same direction as in the first deflecting magnet to be admitted into a decelerating tube, the analyzer being further characterized in that it satisfies the following conditions: Φ1 =Φ2, α1 =α2 =(Φ1 /2)-90 (degrees), and r1 =r2, where Φ1 is the angle of deflection of the scattered beam in the first deflecting magnet, α1 is the angle at which the scattered beam emerges from the first deflecting magnet, r1 is the radius of curvature of a scattered beam with no energy loss in the first deflecting magnet, Φ2 is the angle of deflection of the scattered beam in the second deflecting magnet, α2 is the angle at which the scattered beam is admitted into the second deflecting magnet, and r2 is the radius of curvature of a scattered beam with no energy loss in the second deflecting magnet.
Further, this object can be achieved by the surface analyzer of the present invention characterized by including a first deflecting magnet that deflects both an ion beam to impinge on a sample and a scattered beam from the sample and which is provided on the path of the two beams, and a second deflecting magnet that is provided on the path of a scattered beam passing through the first deflecting magnet and which deflects said scattered beam in the same direction as in the first deflecting magnet to be admitted into a measuring instrument, said analyzer being further characterized in that an accelerating/decelerating tube for not only accelerating the ion beams to be incident on the sample but also decelerating the scattered beams from the sample is provided between the first deflecting magnet and the sample.
Still further, this object can be achieved by the surface analyzer of this invention characterized by including a deflecting magnet provided on both a beam to impinge on the sample and scattered beams having various energy spectrum from the sample and deflecting the scattered beams in the parallel direction to one another on the same plane, and an analyzer, that has a broad position detector and an elongated slit, for detecting the parallel beams.
FIG. 1 is a velocity diagram both before and after collision between an atom M and a proton m; for the purpose of explaining the principle of PELS.
FIG. 2 is a schematic plan view of prior art surface analyzer;
FIG. 3 is a diagram showing the potential profile of the system depicted in FIG. 2;
FIG. 4 is a sketch for illustrating the operating principles of the system shown in FIG. 2; and
FIG. 5 shows an energy spectrum produced from the system shown in FIG. 2.
FIG. 6 is a schematic plan view of a surface analyzer according to first embodiment of the present invention;
FIG. 7 is a schematic partial plan view of a surface analyzer according to second embodiment of the present invention;
FIG. 8 is a schematic diagram of an example of the measuring instrument shown in FIG. 6;
FIG. 9 is a graph showing the profile of optimized solid angle vs scattering angle;
FIG. 10 is a schematic plan view of a surface analyzer according to third embodiment of the present invention;
FIG. 11 is a diagram showing the potential profile of the system depicted in FIG. 10;
FIG. 12 is a perspective view showing the general layout of the third embodiment of the present invention.
FIG. 13 is a perspective view showing the relative positions of a magnet and an analyzer according to fourth embodiment of the present invention;
FIG. 14 shows how a shadow cone is created in the forward direction when protons are scattered by an atom;
FIG. 15 is a sketch of the top few layers of a GaAs crystal showing how proton beams are incident and scattered perpendicular to the surface of the crystal in PELS;
FIG. 16 is a diagram of proton energy loss that occurs in PELS when proton beams are incident in the direction indicated in FIG. 15;
FIG. 17 is a sketch of the top two layers of a GaAs crystal showing how proton beams are incident and scattered obliquely in PELS;
FIG. 18 is a diagram of proton energy loss that occurs in PELS when proton beams are incident in the direction indicated in FIG. 17;
FIG. 19 is a scattering cross-sectional diagram showing how the topmost layer of a sample can be distinguished from its second top layer in terms of the increase in proton energy loss due to collision with electrons;
FIG. 20 is a graph showing the proton yield vs scattering angle for Au and Si.
As FIG. 20 shows, the scattering yield of ion beams such as protons is high in the vicinity of θ=0° and 180°. It therefore became evident that the neighborhood of θ=180° would also be a promising region of scattering angle.
In addition, Eq. (9) shows that at θ=π(i.e., 180°) the Γ dependency of K becomes strongest, so that the atom with which the proton has collided is more easily identified.
At θ=π, the direction in which proton beams are incident on the sample coincides with their scattering direction so they must be separated by some means. To this end, the proton beams are bent by a deflecting magnet by 90° before they are incident on the sample, and the beams scattered in an anti-parallel direction are bent by 90° with another deflecting magnet before they are guided into a measuring system.
If θ=π, K varies most pronouncedly with Γ and the mass M of the atom with which the proton has collided can be determined in the least ambiguous manner.
Therefore, the following consideration is directed
to the case where θ=π. Eq. (9) can be rewritten as: ##EQU8##
The parameter Γ denotes the ratio of the mass, M, of the atom with which the proton is to collide, to the mass, m, of the proton. The mass number of an atom is the mass of the atom with the atomic mass unit (1 amu=1.6605655×10-27 kg) being taken an unity. The mass of a proton, m, is 1.6726485×10-27 kg. If the slight difference between the mass of the proton and the atomic mass unit is disregarded, Γ is equal to the mass number of the atom of interest. Therefore, for the purposes of the following discussion, Γ is referred to as mass number. The mass numbers so defined of several atoms are listed below together with corresponding K values:
O: Γ=16.00, K=0.7785
Al: Γ=26.98, K=0.8621
Si: Γ=28.085, K=0.8672
Ga: Γ=69.72, K=0.94422
As: Γ=74.9, K=0.94799
In: Γ=114.82, K=0.9658
Sb: Γ=121.7, K=0.9677
Pb: Γ=207.2, K=0.98088
Bi: Γ=208.98, K=0.98104.
In this way, the K values of all elements of atoms can be readily calculated.
Suppose the proton has an energy (E0) of 100 keV before collision. After collision with Ga, it will have an energy (E1) of 94.422 keV, and after collision with As, E1 will be 94.799 keV. The difference between the two values of E1 may be expressed by ΔE as follows:
ΔE=377 eV
The proton will lose more energy if it is scattered by the lighter atom Ga and the differential energy loss is given by 377 eV. This is the theory that enables one to tell which of the two atoms, Ga and As, has caused the proton to scatter. In the case of Pb and Bi, ΔE=16 eV and distinction between these two atoms can be made by using a detector having a resolving power of 5 eV.
FIG. 6 is a plan view showing the general layout of a surface analyzer according to first embodiment of the present invention. The operating principles of this analyzer are essentially the same as those of the above-described prior art system. Those components which do not have any particular relevance to the explanation of the differences from the prior art are omitted from FIG. 6.
In the apparatus shown in FIG. 6, a generally T-shaped first deflecting magnet 30 that is typically formed of an electromagnet is provided upstream of the scattering chamber 14. A unit for accelerating ion beams 3 and a unit for performing measurement on scattered beams 4 are provided upstream and downstream, respectively, of the magnet 30. This layout enables measurement for a scattering angle (θ) of 180°.
Ion beams 3 such as proton beams that have been extracted from an ionization source 2 and which have been subjected to mass separation in a magnet 10 are introduced into an accelerating tube 6 that has a plurality of electrodes 7 and in which the beams are accelerated to an energy of about 100 keV as in the prior art. The accelerated beams are deflected by the deflecting magnet 30 on their path and admitted into the scattering chamber 14 (which may be held in an ultrahigh vacuum) to impinge on the sample 15. Since the sample 15 is mounted so as to provide a scattering angle (θ) of 180°, the ion beams 3 are incident perpendicular to the surface of the sample 15 and scattered beams 4 from the sample 15 also emerge in a direction perpendicular to its surface.
As a result, the scattered beams 4 travel backward on the same path as that of the ion beams 3 and pass through the deflecting magnet 30 by which they are deflected in a direction that is opposite the direction of the deflection of the ion beams 3. This second deflection enables the track of the incident ion beams 3 before impinging on the sample 15 to be separated from the track of the scattered beams 4 from the sample 15. It is noted that the magnetic flux generated by the deflecting magnet 30 is directed away from the paper.
A Q lens (electrostatic triple quadrupole lens) 8a is provided downstream of the accelerating tube 6 and another Q lens 8b is provided upstream of the scattering chamber 14. The Q lens 8a (or 8b) serves to shape the ion beams 3 (or scattered beams 4) so that they will be free from any divergence, specifically the divergence directed into or away from the paper. These Q lenses are not indispensable to the present invention but are preferably used for achieving a greater accuracy in measurement.
A second deflecting magnet 32 is provided on the path of incoming scattered beams 4 that have passed through the magnet 30. This magnet 32 deflects the scattered beams 4 in the same direction as achieved by the magnet 30 and admit them at a point near the central axis of a decelerating tube 18 having a plurality of electrodes 17. Like the first deflecting magnet 30, the magnet 32 is typically formed of an electromagnet and the magnetic flux it generates is directed away from the paper.
The decelerating tube 18 retards the scattered beams 4 to such an extent that their energy will to no more than about 1 keV as in the prior art. The decelerated scattered beams 4 are introduced into a measuring instrument 20 that measures the energy spectrum of the beams.
In the present invention, the deflecting magnet 32 is employed for the following reason: depending on the energy loss ΔE caused by scattering in the sample 15, the scattered beams 4 coming through the magnet 30 have been diffused by this magnet 30 as shown schematically in FIG. 6 by 4a (beams of ΔE=0) and 4b (beams of ΔE≠0); the diffused beams 4 are reconverged into a single track by the magnet 32 before they are admitted into the decelerating tube 18. If the diffused scattered beams 4 are immediately introduced into the decelerating tube 18, they will remain diffused or may be sometimes further diffused because of the lens effect of the tube 18; the beam transport efficiency of such diffused beams that are admitted into the measuring instrument 20 varies with their energy loss ΔE, potentially causing such disadvantages as the drop in the reliability of measurements and the difficulty in accomplishing quantitative analyses.
In order to eliminate these problems, the side of the deflecting magnet 30 on which scattered beams 4 travel is constructed in a way that is substantially symmetrical with the deflecting magnet 32. Stated more specifically, the two deflecting magnets are designed to satisfy the following conditions: ##EQU9## where Φ1 is the angle of deflection of the scattered beams in the magnet 30, α1 is the angle at which the scattered beams emerge from the magnet 30, r1 is the radius of curvature of a scattered beam 4a with no energy loss (ΔE=0), Φ2 is the angle of deflection of the scattered beams in the magnet 32, α2 is the angle at which the scattered beams are admitted into the magnet 32, and r2 is the radius of curvature of the scattered beam 4a. In the embodiment under discussion, Φ1 =Φ2 =90° and α1 =α2 =-45° (the minus sign is generally attached to α1 and α2 in the case shown in FIG. 6).
If the three conditions noted above are satisfied, the scattered beams 4a and 4b that have been separated from a single track in the deflecting magnet 30 will travel on parallel paths as they emerge from the magnet 30 and enter the deflecting magnet 32, in which they are deflected in a manner that is just opposite to the mamner of deflection effected in the magnet 30 and are recombined into a single track before leaving the magnet 32.
As a consequence, the scattered beams 4, irrespective of any difference that exists in their energy loss ΔE, are admitted into the decelerating tube 18 as they travel on a single central track, and are thereafter introduced into the measuring instrument 20. This eliminates the chance of variations of occurring in the yield of ion beams coming into the measuring instrument 20 on account of the change in their energy loss ΔE, and thereby enables a wide range of energy losses to be measured with high accuracy. An attendant advantage of the embodiment described above is that it eliminates the need to compensate for the change in beam detection efficiency that is caused by offsetting of the track of the scattered beams 4.
FIG. 7 shows a plan view showing a second embodiment of the invention. A deflecting magnet 34 is used to separate the track of incident ion beams 3 from the track of scattered beams 4, thereby enabling measurement for a scattering angle (θ) of 180°. The resulting dispersed beams 4 are then introduced into a deflecting magnet 36 that converges them at a point near the central axis of the decelerating tube 18 so as to eliminate the chance of variations of occurring in the yield of ion beams coming into the measuring instrument 20 on account of the change in their energy loss ΔE. However, unlike the deflecting magnet 32 used in the first embodiment, the magnet 36 lacks a capability of converging the central tracks of scattered beams 4 of varying energy loss ΔE into a single track as they leave the magnet. Therefore, if the scatterd beams 4 of interest have suffered a broad range of energy loss ΔE, the system according to the first embodiment will provide more accurate measurements than the system shown in FIG. 7.
An exemplary construction of the measuring instrument 20 is shown in FIG. 8 and this is effective for enabling a broad spectrum of energy to be measured at a time. As shown, the basic components of the instrument 20 are a parallel-plate analyzer 23, a micro-channel plate 24, and a position detector 25. The scattered beams 4 are dispersed at different points on the micro-channel plate 24 according to their energies, or values of energy loss ΔE, and the positions on which the beams have fallen are detected with the position detector 25 and a position calculator 26 which allows a multi-channel analyzer 27 to display the counts for the respective positions. Using this type of measuring instrument 20, the quantities of scattered beams form the top few layers of the sample 15 can be measured at a time by simply tilting the sample (the angle of its inclination depends both on the sample and on the specific monolayer in which the incident beams are to be scattered) and an energy spectrum of the shape shown in FIG. 5 can be attained with high efficiency without the need to change the offset voltage Vo or the voltage V.sub. ESA applied to the energy analyzer 21 as in the prior art. This offers the additional advantage of eliminating any of the effects that may be produced as a result of changes in the energy state occurring during the course of spectrum analysis.
FIG. 9 is a graph showing the profile of optimized solid angle vs scattering angle, the vertical axis being graduated on the logarithmic scale. As can be seen from FIG. 9, at θ=180° the optimized solid angle ΔΩ (str), or the beam detection efficiency, is from several hundred (when the sample 15 is made of gold) to several thousand (when the sample 15 is made of silicon) times as high as when θ=20°. In addition, at θ=180° the scattered beams 4 are insensitive to the surface asperities of the sample 15 and are only susceptible to the effects of atoms in the surface of the sample. Therefore, a sharp energy spectrum can be attained and a corresponding improvement is achieved in the precision of analysis.
If it is desired to measure the origin of energy loss or the energy resolving power of the equipment, one has only to control the polarity or flux density of the deflecting magnet 30 so that ion beams 3 admitted into that magnet are directly (i.e., without being impinged on the sample 15) permitted to emerge on the same track as that of the scattered beam 4a which has undergone no energy loss (ΔE=0). This eliminates the existing need to modify the system layout and the problems associated with the prior art, such as the necessity for executing alignment jobs and other time-consuming operations and decreased precision of the reassembled equipment.
A particular advantage of the first embodiment shown in FIG. 6, in which Φ1 =Φ2 =90° and Φ0 which is the angle of deflection of ion beams 3 in the magnet 30 is 90°, is that if one wants to measure the origin of energy loss or the energy resolving power of the equipment, all he has to do is to turn off the excitation of the magnet 30. If this is done, the ion beams 3 will go straight through the magnet 30 following the path indicated by A in FIG. 6 and will emerge from the magnet 30 to travel on the same track as that of the scattered beam 4a which has not suffered any energy loss (ΔE=0). This provides great ease in accomplishing measurement of the origin of energy loss or the energy resolving power of the equipment.
In the apparatus shown in FIG. 7, by changing the polarity of the deflecting magnet 34 and increasing the flux density thereof, the ion beams 3 can be deflected by a large angle in the direction of B such as to enable measurement of the origin of energy loss or the energy resolving power of the apparatus. But according to the first embodiment shown in FIG. 6, the same purpose can be attained by simply turning off the excitation of the deflecting magnet 30.
As described above, the first and second embodiments achieve PELS with the scattering angle being set at a value of approximately 180° and this contributes to the yielding of a sharp energy spectrum while affording a significant improvement in beam detection efficiency. In addition, the scattered ion beams can be admitted into the decelerating tube with their central orbits being converged into a single track irrespective of the difference in their energy loss. This eliminates the variation in detection efficiency due to the difference in energy loss and thereby allows a broad range of energy to be measured in an accurate manner. As a further advantage, the present invention enables the origin of energy loss or the energy resolving power of equipment to be easily measured without changing the layout of the equipment.
FIGS. 10 and 12 are a schematic plan view and a perspective view of a surface analyzer according to the third embodiment of the present invention. The components which are identical or equivalent to those shown in FIG. 6 are identified by like numerals or omitted, and the following description is principally concerned with the differences between the two systems.
In the embodiment shown in FIG. 10, the accelerating tube 6 and the decelerating tube 18 shown in FIG. 6 are replaced by an accelerating/decelerating tube 36 that is provided between the first deflecting magnet 30 and the sample 15 in the scattering chamber 14 and which serves not only to accelerate the ion beams to be incident on the sample 15 but also to decelerate the scattered beams 4 from the sample 15. An accelerating/decelerating voltage Vad is supplied to the tube 36 from a power source 37.
The ion beams 3 extracted from the ionization source 2 are first deflected in the deflecting magnet 30 by, for example, 90° and then accelerated in the tube 36. The accelerated beams are admitted into the scattering chamber 14 to impinge on the sample 15 which is mounted to provide a scattering angle θ of, say, 180°. The scattered beams 4 from the sample 15 travel in a direction opposite to that of the ion beams 3 and are admitted into the tube 36 in which they are decelerated. The decelerated beams are then introduced into the deflecting magnet 30 and deflected by, for example, 90° in a direction opposite to the deflection of the ion beams 3. The beams 4 are further deflected in the deflecting magnet 32 by, for example, 90° and then admitted into the measuring instrument 20. Numeral 5 represents a power source for supplying an extraction voltage Ve.
FIG. 11 shows the potential profile of the system according to the embodiment under discussion; sample 15 is at the point of zero potential, the deflecting magnets 30 and 32 and measuring instrument 20 being at a point equal to the accelerating/decelerating voltage Vad, the accelerating/decelerating tube 36 being at a point between the two potentials, and the ionization source 2 being at a point between Vad and Va (=Vad+Ve).
From the same consideration as applied to derive Eq. (11), the energy E of the scattered beam 4 entering the measuring instrument 20 can be expressed as:
E=qVa-ΔE-qVad=qVe-ΔE                           (14)
and E>0 is condition to be satisfied for the system of FIG. 10 to operate Eq. (14) corresponds to Eq. (10), so that in the system under discussion the spectrum of energy loss can be determined by changing either the extraction voltage Ve or voltage VESA to be imposed on the energy analyzer 21.
The system being discussed has the following advantages over the prior art system shown in FIG. 2.
(1) The potential profile is simplified and contains only two high-potential sectors, Va and Vad. This permits the use of a simplified electrical circuit while obviating the need to employ the heretofore required high-tension cable 26. As a result, trouble such as the disturbance of power sources by noise can be sufficiently reduced to prevent the deterioration of the performance, such as the energy resolving power, of the system.
(2) Since the system has only two high-potential sectors, it requires a smaller space for providing insulation and hence the overall size of the equipment can be reduced. In addition, the ionization source 2, allied apparatus, the measuring instrument 20 and even the deflecting magnets 30 and 32 can be mounted on a single high-potential table 38, and this is another factor that contributes to a reduced size of the equipment.
(3) The offset power source 24 used in the system of FIG. 2 is eliminated from the surface analyzer of the present embodiment. In addition, in this embodiment, the accelerating tube 6 and the decelerating tube 18 are replaced by a single accelerating/decelerating tube 36. This embodiment leads to the use of fewer components and hence a decrease in the manufacturing cost of the equipment than the first and second embodiments.
The structural relationship between the two deflecting magnets 30 and 32 is hereunder described although this is essentially the same as in the system of FIG. 6. The two deflecting magnets are designed to satisfy the following conditions:
Φ1 =Φ2 α1 =α2 =(Φ1 /2)-90 (degrees) and
r1 =r2 where Φ1 is the angle of deflection of the scattered beams in the magnet 30, α1 is the angle at which the scattered beams emerge from the magnet 30, r1 is the radius of curvature of a scattered beam 4a with no energy loss (ΔE=0), Φ2 is the angle of deflection of the scattered beams in the magnet 32, α2 is the angle at which the scattered beams are admitted into the magnet 32, and r2 is the radius of curvature of the scattered beam 4a. In the particular embodiment under discussion, Φ1 =Φ2 =90° and α1 =α2 =-45° (the minus sign is generally attached to α1 and α2 in the case shown in FIG. 10).
If the three conditions noted above are satisfied, the scattered beams 4a and 4b that have been separated from a single track in the deflecting magnet 30 will travel on parallel paths as they emerge from the magnet 30 and enter the deflecting magnet 32. Therefore, using the measuring instrument 20, the quantities of scattered beams from the top few layers of the sample 15 can be measured at a time by simply tilting the sample (the angle of its inclination depends both on the sample and on the specific monolayer in which the incident beams are to be scattered) and an energy spectrum of the shape shown in FIG. 5 can be attained with high efficiency without the need to change the extraction voltage Ve or the voltage VESA applied to the energy analyzer 21. This offers the additional advantage of eliminating any of the effects that may be produced as a result of changes in the energy state occurring during the course of spectrum analysis. The advantages afforded by the present embodiment are: it reduces the occurrence of troubles in power sources and thereby prevents deterioration of the system performance; the system has a smaller size and can be manufactured at a lower cost.
In the fourth embodiment as shown in FIG. 13, only one magnet is used to bend decelerated proton beams. In the above-described embodiments, two magnets are required because it is necessary to converge proton beams at a single point.
FIG. 13 is a perspective view showing the relative positions of a magnet 101 and an analyzer G incorporating the concept of the present invention. Magnet 101 corresponds to magnet 30 in FIGS. 7 and 11. Analyzer G is wider than analyzers as shown in the other embodiments and employs the same principles of measurement. Other components of the fourth embodiment are the same as the embodiments described above, and therefore are omitted hereinafter.
To understand this embodiment more easily, assuming scattered proton beams having two levels of energy enter the magnet 101 at point J. Beams of the lower energy travel along a track R1 having the smaller radius of curvature and emerge from the magnetic field at point K. Beams of the higher energy travel along a track R2 having the larger radius of curvature and emerge from the magnetic field at point N. If the centers of tracks R1 and R2 are written as O1 and O2, respectively, points J, O1, O2, K and N are all situated in the reference beam plane (P). After leaving the magnetic field at points K and N, the two beams will travel along straight tracks T1 and T2, which are also included in the reference beam plane (P).
The analyzer G is positioned in such a manner that its bottom surface forms an angle Ψ with respect to the reference beam plane (P) and that the slit 105 in the analyzer will traverse the reference beam plane (P).
Consider here a rectangular coordinate system in which z-axis is taken along the slit 105, y-axis dropped perpendicular to the bottom surface of the analyzer, and x-axis directed from the slit towards the position detector 104. The proton beams spread Over the area T1 -T2 but are admitted into the analyzer G through an elongated slit 5. In the analyzer G, a voltage of Vo is applied downwardly. After passing through the slit 105, the proton beams will travel in a plane that is parallel to x-y plane but because of the applied voltage Vo, they are depressed toward the bottom of the analyzer to fall into either one of the channels in the position detector 104.
The origin O of the x-y-z coordinate system is determined as the point at which the plane that passes through point J (i.e., at which the scattered beams enter the magnet 101 and which is perpendicular to the reference beam plane (P) intersects the center line of the slit 105. This is possible if the transversal width of the analyzer is sufficiently great.
Beam T1 will fly over a short distance and fall at point Q1 in the position detector, whereas beam B2 will fly over a longer distance and fall at point Q2 in the position detector. Protons of high energy will pass through the slit at a large value of z and their length of flight L in the analyzer is great. On the other hand, protons of low energy will pass through the slit at a small value of z and their length of flight L in the analyzer is small. Therefore, the points at which the protons fall in the position detector 104 will draw a curve if they are connected together, and the protons will not fall all points of the detector 104. The locus of the falling points of the protons is hereinafter referred to as the locus of detection points Ψ, which may be determined by the following procedures wherein the detection point is denoted by Q.
From Eq. (28), the x-coordinate of point Q is given by: ##EQU10## The z-coordinate of point Q depends on the amount of deflection of a proton by magnet 1 and is given by:
z=RsinΦ                                                (16)
where Φ is a deflection angle such as <KO1 J, and R is the radius of curvature of proton bending. Since the velocity of a proton V is the product of R and the angular cyclotron frequency Ωc of the proton beam, ##EQU11## Eliminating Ea from Eq. (15) and (20), ##EQU12## Therefore, the locus γ of point Q on the x-z plane is a parabola.
Eq. (21) contains the cyclotron frequency Ωc. The proton and the ions of other atoms have different masses and hence different value of Ωc. If the top surface of the position detector 104 is masked with a plate having a cutout whose contour follows the locus γ, the ions of any unwanted atoms are blocked by the mask and will not enter the position detector. Therefore, the mask is effective in preventing count errors that will otherwise occur because of the presence of unwanted ions.
The width π of the slit 105 and the position detector 104 in z-direction depends on the expected variation in proton energy Ea and the greater this variation, the larger π should be. The variation in proton energy Ea is closely related to the variation in the mass M of the atom to be investigated. For instance, π of approximately 10 cm is sufficient cover a fairly wide range of masses.
The angle of deflection, Φ, of protons in the magnet 101 may or may not be 90°. If Φ is 90°, it can be seen from Eq. (16) that good beam separation can be achieved in z-direction. However, it is more important to achieve good beam separation in x-direction than in z-direction. If Φ is large, the size of the magnet 101 must be increased. If Φ is small, the space in which the analyzer G can be installed is limited. From these considerations, Φ is generally selected from the range of 30°-150°, desirably within the range of from about 45° to about 135°.
The surface analyzer of the present embodiment has the following advantages:
(1) A magnet 32 as shown in FIGS. 6 and 10 is eliminated and elimination of this bulky magnet contributes to a substantial reduction in the overall size of PELS equipment;
(2) the use of a simplified high-potential table is realized;
(3) the beam line from the sample to the analyzer is shortened and this allows for reduction in the length of the accelerating/decelerating tube;
(4) the number of operational parameters is decreased to provide for a simpler operation of the equipment;
(5) high reproducibility is attained in analysis;
(6) a uniform proton transport efficiency is realized;
(7) simultaneous measurements can be achieved over a broad range of atomic masses; and
(8) a mask with a cutout whose contour follows the locus of detection point may be placed over the position detector so as to prevent any of the ions other than protons from entering this detector.
The following description are some examples of methods of measuring various objects by employing the surface analyzer according to this invention.
A. Depth Analysis by Shadow Cone
As shown in FIG. 14, when protons having mass m are scattered by a heavy atom M, an area where no protons exist will occur in the forward direction and this is generally referred to as a shadow cone. If x-axis is drawn through the atom M parallel to motion of individual protons, a shadow cone is produced because protons far from the x-axis are scattered at small angle while those near the x-axis are scattered at large angles.
Assuming the atom with a charge Ze and a proton with a charge ze, the track of the proton undergoing Coulomb scattering is expressed by the following polar equations: ##EQU13## where b is the initial distance of the proton from x-axis, and E0 is the kinetic energy of the proton and is the same as what is given by Eq. (7).
Eq. (12) shows that the range of scattering angles is 2cos-1 1/ε and, therefore, the scattering angle θ is given by:
θ=π-2cos-1 1/ε                       (30)
As the first approximation, suppose that a proton beam bent at point y=b on the y-axis flies at angle θ with respect to x-axis. Then, the locus of the proton beam after scattering is given by:
y-b=xtanθ                                            (31)
The shape of the shadow cone is chiefly determined by proton beams that are scattered at small angles. Therefore, as the second approximation, assume that the scattering angle θ is small (vuz., b is large). Then, ##EQU14## which can be rewritten as: ##EQU15## The shadow cone which is the envelope of the family of curves expressed Eq. (31 ) can be found by the following procedures. First, take the partial derivative of Ea. (31) with respect to b, ##EQU16## which can be rewritten as: ##EQU17## Substituting Eq. (21) in Eq. (17), ##EQU18##
By using the shadow cone in a dextrous manner, one can identify the atoms in the top monolayer of a sample as shown in FIGS. 15-18.
Suppose proton beams are directed perpendicular to the surface of a sample as shown in FIG. 15 for measuring the energy distribution of protons reflected in opposite direction (θ=π). The yield of scattered protons has two peaks as shown in FIG. 11. If the sample is GaAs, FIG. 16 alone is insufficient to tell whether Ga or As atoms are present in the top monolayer of the surface. If, on the other hand, proton beams are impinged on the sample at an angle as shown in FIG. 17 such that the atoms of the element in the second top layer are located within the shadow cones created by the atoms of the element in the topmost layer, the energy distribution of protons will have only one peak as shown in FIG. 18, revealing that Ga atoms are present in the topmost layer.
B. Depth Analysis Based on Collision with Electrons
PELS is also capable of differentiating atoms in the top monolayer from those in the underlying (second top) layer. PELS is a technique of analysis that identifies atoms in a sample based on the distribution of energy loss caused by collision between protons and atoms. In the sample, protons are also subjected to the effects of scattering by electrons. The mass of electrons is so small that the motion of the protons will be little impeded by electrons. However, protons as well as electrons are charged particles and will lose energy because of collision with electrons which outnumber the protons. This energy loss by protons can be used to tell in which of the top two monolayers of the sample the protons have been scattered.
The details of this mechanism will be hereunder described with reference to FIG. 19. Consider two cases, one in which an incident proton is scattered at point J in the topmost layer and the other case where it is scattered at point G in the second top layer. In both cases, the proton is scattered in the direction of θ/2 which is an angle formed with respect to the plane of each layer. The scattering angle is θ but this does not mean that scattering of the proton occurs only in the direction of θ/2 according to Bragg's law. What is meant here is that although protons can be scattered in any direction, only the energy distribution of protons that have been scattered in the direction of θ/2 is measured in PELS of the present invention.
Suppose electrons have a stopping power S, which is defined as the energy lost by a proton passing through an electron-containing sample per unit length of path. The proton scattered in the second top monolayer travels along a path that is longer than the path of the proton scattered in the topmost layer, and the difference is represented by FGH in FIG. 19 which causes the former proton to be subjected to correspondingly large effects of the stopping power of electrons. If the difference in energy between the protons scattered in the topmost and second top monolayers is expressed as ΔF, ##EQU19## If d=5.6 A, S=10 eV/A and θ=30,
ΔF=432 l ev                                          (38)
If θ is increased, ΔF is decreased correspondingly; for example, θF=112 eV if θ=180°. In other words, if proton beams are incident perpendicular to the sample, the energies of the protons that have been scattered in the topmost and second top monolayers differ from each other by approximately 100 eV. Furthermore, by decreasing θ, ΔF can be sufficiently increased to provide for distinction between proton scatterings by dissimilar atoms in the topmost and second top monolayers.
Patent CitationsCited PatentFiling datePublication dateApplicantTitleUS3240931 *Sep 28, 1962Mar 15, 1966Bendix CorpSpatial discriminator for particle beamsUS3617739 *Apr 9, 1970Nov 2, 1971Inst Plasmaphysik GmbhIon lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatusUS3812354 *May 31, 1973May 21, 1974Atomic Energy CommissionThermoluminescent detector for mass spectrometerUS3819941 *Oct 15, 1973Jun 25, 1974Bendix CorpMass dependent ion microscope having an array of small mass filtersUS3866042 *Jul 17, 1973Feb 11, 1975CamecaMicroanalyser convertible into a mass spectrometerUS3955084 *Sep 9, 1974May 4, 1976California Institute Of TechnologyElectro-optical detector for use in a wide mass range mass spectrometerUS4132892 *Jul 1, 1976Jan 2, 1979Gesellschaft Fur Strahlen- Und Umweltforschung Mbh MunchenRaster scanning ion microscope with quadrupole mass filterUS4564758 *Feb 1, 1984Jan 14, 1986CamecaProcess and device for the ionic analysis of an insulating sampleUS4694170 *Dec 24, 1985Sep 15, 1987Office National D'etudes Et De Recherches AerospatialesInstrument for very high resolution ionic micro-analysis of a solid sample* Cited by examinerReferenced byCiting PatentFiling datePublication dateApplicantTitleUS5059785 *May 30, 1990Oct 22, 1991The United States Of America As Represented By The United States Department Of EnergyBackscattering spectrometry device for identifying unknown elements present in a workpieceUS5689112 *Apr 12, 1996Nov 18, 1997Enge; Harald A.Apparatus for detection of surface contaminations on silicon wafersUS7005657Feb 4, 2005Feb 28, 2006Varian Semiconductor Equipment Associates, Inc.Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recoveryUS7041975 *Sep 21, 2004May 9, 2006Kabushiki Kaisha Kobe Seiko ShoSample analyzerUS20050067567 *Sep 21, 2004Mar 31, 2005Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.)Sample analyzer* Cited by examinerClassifications U.S. Classification850/10, 250/297, 250/296International ClassificationH01J49/02, G01N23/20, H01J49/30, H01J49/14, G21K1/093, G01Q30/04Cooperative ClassificationG21K1/093, H01J49/142, G01N23/20, H01J49/025, H01J49/30European ClassificationG21K1/093, H01J49/02B, H01J49/30, H01J49/14A, G01N23/20Legal EventsDateCodeEventDescriptionJul 6, 1987ASAssignmentOwner name: NISSIN ELECTRIC COMPANY, LIMITED, NO. 47, UMEZUTAKFree format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:AOKI, MASAHIKO;KONISHI, MASASHI;MATSUDA, YASUHIRO;AND OTHERS;REEL/FRAME:004742/0154Effective date: 19870626Owner name: NISSIN ELECTRIC COMPANY, LIMITED,JAPANFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:AOKI, MASAHIKO;KONISHI, MASASHI;MATSUDA, YASUHIRO;AND OTHERS;REEL/FRAME:004742/0154Effective date: 19870626Aug 21, 1990CCCertificate of correctionOct 15, 1992FPAYFee paymentYear of fee payment: 4Oct 9, 1996FPAYFee paymentYear of fee payment: 8Oct 20, 2000FPAYFee paymentYear of fee payment: 12RotateOriginal ImageGoogle Home - Sitemap - USPTO Bulk Downloads - Privacy Policy - Terms of Service - About Google Patents - Send FeedbackData provided by IFI CLAIMS Patent Services


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Strategic management of technological innovation (Book, 2010) [WorldCat.org]
http://www.worldcat.org/oclc/426147407
ISBN/ISSN: 9780073381565 007338156X 9780071289573 0071289577
OCLC:426147407
A comprehensive text for the Technology and Innovation Management course. It offers an approach that synthesizes the major research in the field, providing students with the knowledge needed to enhance case discussion and analysis.
Teknolojik yenilikler -- Yönetim.
9780073381565 007338156X 9780071289573 0071289577
426147407
xvi, 318 p. : ill. ; 24 cm.
Part I: Industry dynamics of technological innovation --
Types and patterns of innovation --
Standards battles and design dominance --
Timing of entry --
Part II: Formulating technological innovation strategy --
Defining the organization's strategic direction --
Choosing innovation projects --
Collaboration strategies --
Protecting innovation --
Part III: Implementing technological innovation strategy --
Managing the new product development process --
Managing new product development teams --
Crafting a deployment strategy.
Melissa A. Schilling.
Add tags for "Strategic management of technological innovation".
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steve.beckford
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Strategic management of technological innovation/Melissa A Schilling; New York : McGraw-Hill/Irwin, ©2010.

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101 Theory Drive: A Neuroscientist's Quest for Memory by Terry McDermott | NOOK Book (eBook) | Barnes & Noble®
An obsessive scientist and his eclectic team of researchers race to discover one of the hidden treasures of neuroscience—the physical makeup of memory—and in the process pursue a pharmaceutical wonder drug.Gary Lynch is the real thing, the epitome of the rebel scientist: malnourished, contentious, inspiring, explosive, remarkably ambitious, and

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Corn Maze in Shawnee, Oklahoma with Reviews & Ratings - YP.comFind People•Advertise With UsBrowseFind PeopleFeatured CollectionsRestaurantsAutomotiveHome ImprovementHealth & WellnessAttorneysAdvertise with usWhat do you want to find?Search by business name, or keywordnearWhere? Address, ZIP Code, or NeighborhoodMy current locationSearchWelcome mybookProfileReviewsPhotosSign OutSign In•JoinHomeShawnee, OKCorn MazeShawnee Corn MazeSort:Most RelevantMost RelevantDistanceRatingName (A - Z)FiltersFiltersMore NeighborhoodsDoneClear AllMore CategoriesCorn ProductsFarm Management ServiceFarmsLivestock BreedersLivestock DealersRanchesWedding Chapels & CeremoniesDoneClear AllCategoryFarmsLivestock BreedersLivestock DealersMore »FeaturesBook A TableCouponsNeighborhoodsGo to List ViewSearch This AreaSponsored LinksAdd to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?1. Karl & Tony Kozel Farm7108 N HarrisonShawnee, OK 74804(405) 275-1490Corn ProductsDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?2. Express Angus Ranch45155 Ranch RdShawnee, OK 74804(405) 275-5614FarmsRanchesLivestock DealersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?3. Cargo Ranch38137 Cabin TrlShawnee, OK 74804(405) 273-2806FarmsRanchesLivestock DealersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?4. Harvest Creek Farms10165 N HarrisonShawnee, OK 74804(405) 275-1112FarmsFarm Management ServiceDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?5. Double E FarmsRR 3 # 50Wellston, OK 74881(405) 650-0544FarmsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?6. Haynes Farms17401 SE 192nd StWanette, OK 74878(405) 527-9677FarmsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?7. Gunn FarmsJones, OK 73049(405) 399-5513FarmsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?8. Higdon FarmMcLoud, OK 74851(405) 964-3690FarmsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?9. Crossing Hearts Ranch22214 Skagg City RdTecumseh, OK 74873(405) 598-1480FarmsRanchesLivestock DealersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?10. Blc Angus Ranch24723 Skagg City RdTecumseh, OK 74873(405) 598-3757FarmsRanchesLivestock BreedersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?11. Rad Welding Service105366 S 3410 RdMeeker, OK 74855(405) 279-1122FarmsDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?12. Terrell Farms7894 Sherman RdPrague, OK 74864(405) 567-3789FarmsDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?13. Gem Limousin Ranch37208 Highway 59BMacomb, OK 74852(405) 598-1801FarmsRanchesLivestock DealersDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?14. Bernard Farms16861 E Franklin RdNewalla, OK 74857(405) 360-1976FarmsDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?15. 3 Creeks Ranch349776 E 1050 RdPrague, OK 74864(405) 567-8603FarmsLivestock BreedersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?16. Canadian Valley Ranch11230 Ns 3550Seminole, OK 74868(405) 382-2954FarmsRanchesLivestock DealersWebsiteDirectionsMore InfoRooms & Rates »Add to mybookRemove from mybookAdded to your other collection!Error when adding to other collectionThis business was removed from the other collectionInaccurate Result?17. Wilson's 2 Rivers Ranch Co36250 Ew 1120Seminole, OK 74868(405) 382-2325FarmsRanchesLivestock DealersDirectionsMore InfoRooms & Rates »Sponsored LinksShowing1-17
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DONALD PEMBERTON Obituary - Richmond, Virginia | Legacy.com
HomeObituariesDONALD LEE PEMBERTON Obituary
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I found Don to be a fine and wonderful friend...He will be missed...yet
his smile will remain
Sorry to hear of Donald's passing. Your family will be in our thoughts.
July 15, 2013 | So. Berwick, ME
We are both sorry to learn of this loss, and will be in Richmond this afternoon at Bliley's. Don will be remembered for his humor, his energy, and his positive outlook, as well as for his many professional accomplishments.
Don and Susan Räger
July 14, 2013 | Coles Point, VA
I didn't do his good looks justice.
One of my favorite people in the world. I miss him terribly.
So sorry to hear of Don's passing. God bless and keep him and his family.
July 14, 2013 | Aylett, VA
We love you and are going to miss you very much!
July 13, 2013 | Powhatan, VA
I found out today of Don's passing. I must say that he was a good friend while I was employed at Reynolds Metals Co. I came close to taking a job under his management, but he notified me in time to allow me to stay employed while we went through a tough down sizing, both with Corporate Engineering and Research and Development Departments. I am sure that many will miss Don. I wish all of his family the best and hope that he will long be remembered.
July 13, 2013 | Bethlehem, GA
Don's fellow artists will surely miss his support and humor during Wednesday morning art class.
July 13, 2013 | Tappahannock, VA

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(Redirected from Reish Galuta)
Exilarch (Hebrew: ראש גלות Rosh Galut, Aramaic: ריש גלותא Reysh Galuta or Resh Galvata lit. "head of the exile", Arabic: رأس الجالوت Raas al-Galut, Greek: Αἰχμαλωτάρχης Aechmalotarches lit. "the captives") refers to the leaders of the Diaspora Jewish community in Babylon following the deportation of King Jeconiah and his court into Babylonian exile after the first fall of Jerusalem in 597 BCE and augmented after the further deportations following the destruction of the kingdom of Judah in 587 BCE. The people in exile were called golah (Jeremiah 28:6, 29:1) or galut (Jeremiah 29:22).
Retrieved from "https://en.wikipedia.org/w/index.php?title=Exilarch&oldid=740391491"	Categories: Islam and JudaismExilarchsJewish Babylonian historyJewish politiciansJewish royaltyIraqi JewsHidden categories: All articles with unsourced statementsArticles with unsourced statements from January 2014Wikipedia articles incorporating a citation from the 1906 Jewish EncyclopediaWikipedia articles incorporating text from the 1906 Jewish Encyclopedia	Navigation menu
AlemannischالعربيةБългарскиDeutschEspañolفارسیFrançaisItalianoעבריתPolskiРусскийSrpskohrvatski / српскохрватски	Edit links	This page was last modified on 20 September 2016, at 19:44.

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We usually book an ocean front room, but this... - Review of Port Royal Hotel - TripAdvisor
“Best hotel in Wildwood, next to Lampliter...”
“Also, the pool area is MUCH cleaner, updated and...”
“The pool was nice, and loved that it was right on...”
“The pool was awesome with lots of chairs and...”
“The pool was perfect temperature and was deep and...”
We usually book an ocean front room, but this... - Review of Port Royal Hotel
“No better place to stay on the Crest”
douglasjs2
No better place to stay on the Crest
We love the Port Royal and have been coming to this hotel for the past 10 years (or more) . They are always upgrading. We usually book an ocean front room, but this time we came for a couple of nights and booked the deluxe hotel room, and were very pleased. The hotel does a great job of keeping the rooms cleaned , the lobby is beautiful, and their restaurant always serves the freshest foods. Their is no better place to stay than the Port Royal.
Ask douglasjs2 about Port Royal Hotel
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A clean Wildwood hotel
- Clean room & common areas.
- Kids loved the pool (has a 9 foot deep end but no diving board).
- Good restaurant in the lobby for breakfast. Didn't try dinner though.
Ask C_M_DAD about Port Royal Hotel
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Recently stayed at the Port Royal for 4 nights and I have to say it was phenomenal. Everything from check-in to check-out was handled professionally and the maids could not be more accomodating. We had to move from one roon to another which put a little snag in our trip but only because the people getting out of the other room refused to leave by 11 am. The front desk had the cleaning staff in there immediately and we were able to get on with our vacation in no time.
We called last minute for a reservation and I have to say the woman on the other end couldn't have been more helpful trying to find us a room for the dates we needed and from speaking with some "regulars" at the pool, we were very lucky to get a room since they are usually booked that week with a lot of "regulars".
Can't wait to go back next time! Don't think twice about booking your trip here, you won't be disappointed.
Ask kimmy226 about Port Royal Hotel
1 Thank kimmy226
Port Royal Hotel - Jersey Shore's Best
Nothing beats a vacation down at the Jersey Shore, especially if its in Wildwood Crest and at the Port Royal Hotel. We stayed there July 14-18 in a deluxe hotel room that overlooked the pool. The hotel is beautiful, superbly maintained (except for the missing ice machine on the 6th floor) and well-managed. Particular praise goes to the the household staff who are professional and friendly and who keep the rooms and common areas ultra clean. Many guests return to the same rooms on the same dates every year so you are apt to see familiar faces. When I checked out on Sunday morning, I paid my deposit for my 2011 stay - putting down $$$ 51 weeks in advance tells you that I seriously consider this a 5-star hotel and an important part of my summer vacation.
Some details: its ocean front and there is a boarded walkway from the street down to the beach (75% of the way). the pool is open from 9am until 7pm so its quiet in the evening. This isn't a place for 'college crowd of screaming 20-somethings'. Its on the trolley line so you can easily get down to the boardwalk without worrying about parking
hitraveler17
BEST RESORT ON THE JERSEY SHORE
I go every year. You may look around but is the best. Amazing clean pool, great food at the restaurant. Nice rooms and friendly staff. Pretty close to the boardwalk, and no wayward teenagers around. STAY HERE! AMAZING!
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very clean, friendly staff, nice pool, great location.
Ask PhlipDowt about Port Royal Hotel
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Great customer service any hour of the day. Super Clean Hotel
After arriving in wildwood and physically going into two other hotels to view their rooms we thought we were never going to find a place to stay that would suit our desire for a clean enviroment. Many times the reviews on this website are not completely what you find when you arrive. This hotel should be rated number one in wildwood period. I spoke to many returning travelers that had been going to the port royal for more than 10 years. The room was very clean, the lobby was very inviting, and the staff are very friendly. Rod at the front desk was a wealth of knowledge( he works as the night manager). AJ one of the lifeguards is very professional and my children really enjoyed his company as I did. They are proper and professional they seem to enjoy their job. I am a trained travel agent and have never stayed in a room so clean. My children are wall traveled an well mannered, this is a great place for a family who enjoys well behaved children not for those who allow children to act foolish. Many retired individuals whom are there to relax and enjoy. If your children are loud and not considerate of others do everyone else a favor and stay somewhere else. If your a couple or a family with children that are behaved, stop looking and stay here. I think this hotel is well worth the money, a bargin for all that you get, if you have the option of the package it's well worth the money. Oh by the way, try the frozen peach yoguart at the hotel restaurant.
Ask susiecanoe about Port Royal Hotel
TripAdvisor is proud to partner with Hotels.com, Travelocity, Orbitz, Booking.com, Hotwire and TripOnline SA so you can book your Port Royal Hotel reservations with confidence. We help millions of travelers each month to find the perfect hotel for both vacation and business trips, always with the best discounts and special offers.

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Our edible toadstools and mushrooms and how to distinguish them; a selection of thirty native food varieties, easily recognizable by their marked individualities, with simple rules for the identification of poisonous species by W. Hamilton Gibson | 2940019445714 | NOOK Book (eBook) | Barnes & Noble
Our edible toadstools and mushrooms and how to distinguish them; a selection of thirty native food varieties, easily recognizable by their marked individualities, with simple rules for the identification of poisonous species
2940019445714


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PORTER'S COTTAGES - Updated 2018 Prices & Cottage Reviews (Lake George, NY - Bolton Landing) - TripAdvisor
Porter's Cottages, Lake George, NY - Bolton Landing
See all Specialty Lodging in Bolton Landing
Porter’s is a rustic 1950’s style Adirondack housekeeping cottage community set in Bolton Landing, NY. We have 16 cottages on our property, sleeping between 4-6 guests each and are fully equipped. Enjoy our private sandy beach with a fire pit, dock spaces for your boat, canoes, kayaks...
35.3 miles to Rutland Airport
View all 38 restaurants in Bolton Landing
View all 28 things to do in Bolton Landing
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197tara
An absolute gem of a place with the absolute best host.
We decided to take our annual “cold camping” trip indoors this year and chose Lake George as our destination. We selected Porter’s Cottages based on the description and photos of 50’s style rustic cabins. From our initial email response from the host Joe until we...More
Thank 197tara
35 miles to Rutland Airport
2.2 miles to Shelving Rock Falls
37.9 miles to Rutland Airport
1.8 miles to Lake George
45.6 miles to Rutland Airport
1.5 miles to Circle B Ranch
38 miles to Rutland Airport
Free Wifi throughout the resort and the bed and bedding was so comfortable, we joked about strapping it to the roof of the car! Spent the Thanksgiving weekend here- the tranquility of the lake and Bolton Landings was surreal and much needed. Good: The property is beautiful, overlooking and surrounded by Lake George. The town of Bolton...
Great place, wonderful view of the lake, free breakfast Saturday morning, wonderful staff.What else could you want? I take my wife on a date each month, and during our stay at Lake George I chose this as a surprise over our other selection. It's clearly an old mansion, impressive both from outside and inside. Just the walk from...
We had a wonderful time and the accommodations were fabulous. Everything was neat and clean, the kitchen was amazing with all the extras we needed for the weekend. The rooms were spacious, and the front deck had... Every year for the past three years we have gone to Fern Lodge to celebrate our wedding anniversary and we hope to continue doing so for many years to come. The place is charming with fantastic views of the lake...
Air conditioning working very well on 90 degree day. Clean, spacious townhouse. Adequately supplied kitchen. The only drawback was that I was in townhouse 24A and it wasn't convenient to the parking area. It was raining and the stone stairs to get to the unit were...
Porter’s is a rustic 1950’s style Adirondack housekeeping cottage community set in Bolton Landing, NY. We have 16 cottages on our property, sleeping between 4-6 guests each and are fully equipped. Enjoy …More our private sandy beach with a fire pit, dock spaces for your boat, canoes, kayaks, a paddleboat, and a rowboat for our guest’s use. Enjoy the variety of activities Bolton provides vacationers! Less
$1,060 - $1,280 (Based on Average Rates for a Standard Room)
Porter's Cottages Lake George, NY - Bolton Landing


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416,616 site where i can post looking for an illustrator for a book jobs found, pricing in USD
Showing 1 to 50 of 416,616 entries

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