text:
Patent US4724874 - Sealable transportable container having a particle filtering system - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More »Sign inAdvanced Patent SearchPatentsA sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior...http://www.google.com/patents/US4724874?utm_source=gb-gplus-sharePatent US4724874 - Sealable transportable container having a particle filtering systemAdvanced Patent SearchPublication numberUS4724874 APublication typeGrantApplication numberUS 06/840,380Publication dateFeb 16, 1988Filing dateMay 1, 1986Priority dateMay 1, 1986Fee statusPaidPublication number06840380, 840380, US 4724874 A, US 4724874A, US-A-4724874, US4724874 A, US4724874AInventorsMihir Parikh, Anthony C. BonoraOriginal AssigneeAsyst TechnologiesExport CitationBiBTeX, EndNote, RefManPatent Citations (15), Referenced by (144), Classifications (20), Legal Events (10) External Links: USPTO, USPTO Assignment, EspacenetSealable transportable container having a particle filtering system
US 4724874 AAbstract
A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.
1. For use with processing equipment having a port plate and a port door sealably mating with the port plate, a transportable container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles; the box including a box top having first and second box top sealing surfaces and a box door having a first box door sealing surface sealably mating with the first box top sealing surfaces for making a first seal; conduit means for communicating between the interior space and an environment external to the box; filter means for filtering fluids passing through the conduit means; the port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; the port door having a first port door sealing surface for sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top whereby said first seal is made and released by operation of the box door latch means; the port door including means for activating the box door latch means; and means for moving fluids into and out of the box through the filtering means, the means for moving fluids being in communication with the conduit means, whereby upon activation of the fluid moving means, the interior space is alternatively evacuated or pressurized. 2. For use with processing equipment having a port plate and a port door sealably mating with the port plate, a container for maintaining articles to be processed clean, comprising:a hermetically sealable box defining an interior space for containing the articles; the box including:a box top having first and second box top sealing surfaces, activatable circulation means for circulating air within the interior space, and a box door having a first box door sealing surface sealably mating with the first box top sealing surface for making a first seal; filtering means for filtering air within the interior space; the port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; the port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top for making the first seal; and the port door including means for activating the box door latch means whereby upon activation of the circulation means, fluid circulates throughout the interior space and through the filtering means trapping particles in the interior space. 3. For use with processing equipment having a port plate and a port door mating with the port plate, a container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including a box top having an activatable circulation means and a box door for opening and closing the box, the box door including box door latch means for latching the box door to the box top; filter means for trapping particulates in the fluid and the interior space; the port plate adapted for receiving the box; the port door including means for activating the box door latch means; whereby upon activation of the circulation means fluid moves in the interior space through the filter means trapping particles from the interior space. 4. For use with processing equipment having a port plate and a port door sealably mating with the port plate, a container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including:a box top having conduit means for communicating between the interior space and the port plate, and a box door having a first box door sealing surface sealably mating with the first box top sealing surface for making a first seal; filter means in communication with the conduit means for filtering fluids which flow into and out of the interior space; fluid moving means for moving fluid into and out of the box; the port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal, the port plate adapted for receiving the fluid moving means, the fluid moving means engaging the conduit means when in the port plate and being selectively activatable; the port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top for making the first seal; and the port door including means for activating the port door latch means, whereby upon activation of the fluid moving means the interior space may be alternatively pressurized or evacuated through the port plate. 5. For use with processing equipment having a port plate and a port door sealably mating with the port plate, a container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including:a box top having first and second box top sealing surfaces, and a box door having a first box door sealing surface for sealably mating with the first box top sealing surface for making a first seal, first conduit means for communicating between the interior space and the port door; filter means for filtering fluids passing through the first conduit means; the port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; the port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal and second conduit means for communicating with the first conduit means; box door latch means for latching the box door to the box top for making the first seal; the port door including means for activating the box door latch means; the processing equipment including third conduit means in communication with the second conduit means for facilitating communication of the interior space with means for moving fluid into and out of the interior space through the filter means, whereby upon activation of the fluid moving means the interior space may be alternately pressurized or evacuated through the port door. 6. A transportable container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including conduit means for communicating between the interior space and the environment external to the box; filter means for filtering fluids passing through the conduit means; a box including a box top having first and second box top sealing surfaces and a box door having a first box door sealing surface sealably mating with the first box top sealing surfaces for making a first seal; a port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; the port door having a first port door sealing surface for sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top whereby said first seal is made and released by operation of the box door latch means; the port door including means for activating the box door latch means; and means for moving fluids into and out the box through the filter means, the means for moving fluids being connected to the conduit means, whereby upon activation of the fluid moving means, the interior space is alternatively evacuated or pressurized. 7. A container for maintaining articles to be processed clean, comprising:a hermetically sealable box defining an interior space for containing the articles; the box including:a box top having first and second top sealing surfaces, activatable circulation means for circulating air within the interior space, and a box door having a first box door sealing surface sealably mating with the first box top sealing surface for making a first seal; filtering means for filtering air within the interior space; a port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; a port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top for making the first seal; and the port door including means for activating the box door latch means whereby upon activation of the circulation means, fluid circulates throughout the interior space and through the filtering means trapping particles in the interior space. 8. A container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including a box top having an activatable circulation means and a box door for opening and closing the box, the box door including box door latch means for latching the box door to the box top; filter means for trapping particulates in the fluid and the interior space; a port plate adapted for receiving the box; a port door including means for activating the box door latch means; whereby upon activation of the circulation means fluid moves in the interior space through the filter means trapping particles from the interior space. 9. A container for maintaining articles to be processed clean, comprising:a box defining an interior space for containing the articles, the box including:a box top having conduit means for communicating between the interior space and the port plate, and first and second box top sealing surfaces, and a box door having a first box door sealing surface sealable mating with the first box top sealing surface for making a first seal; filter means in communication with the conduit means for filtering fluids which flow into or out of the interior space; fluid moving means for moving fluid into and out of the box; a port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal, the port plate adapted for receiving the fluid moving means, the fluid moving means engaging the conduit means when received in the port plate; a port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal; box door latch means for latching the box door to the box top for making the first seal; and the port door including means for activating the port door latch means, whereby upon activation of the fluid moving means, whereby the interior space may be alternatively pressurized or evacuated through the port plate. 10. A container for maintaining articles to be processed clean for use with the processing equipment, comprising:a box defining an interior space for containing the articles, the box including:a box top having first and second box top sealing surfaces, and a box door having a first box door sealing surface for sealably mating with the first box top sealing surface for making a first seal, first conduit means for communicating between the interior space and the port door; filter means, in communication with the conduit means, for filtering fluids passing through the conduit means; a port plate having first and second port plate sealing surfaces, the first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal; a port door having a first port door sealing surface sealably mating with the second port plate sealing surface for making a third seal and second conduit means for communicating with the first conduit means; box door latch means for latching the box door to the box top for making the first seal; the port door including means for activating the box door latch means; the processing equipment including third conduit means in communication with the second conduit means for facilitating communication of the interior space with means for moving fluid into and out of the interior space through the filtering means, whereby upon activation of the fluid moving means the interior space may be alternately pressurized or evacuated through the port door. Description
SEALED STANDARD INTERFACE APPARATUS, Inventors George Allen Maney, Andrew William O'Sullivan, W. George Faraco, Ser. No. 635,384, Filed: July 30, 1984.
INTELLIGENT WAFER CARRIER, Inventors: George Allen Maney, Anthony Charles Bonora, Mihir Parikh, Ser. No. 686,444, Filed: Dec. 24, 1984, now U.S. Pat. No. 4,674,939.
DOOR ACTIVATED RETAINER, Inventors: George Allen Maney, W. George Faraco, Mihir Parikh, Ser. No. 686,443, Filed: Dec. 24, 1984.
LONG ARM MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS, Inventors: Anthony Charles Bonora, Andrew William O'Sullivan, Ser. No. 769,709, Filed: Aug. 26, 1985, now U.S. Pat. No. 676,709.
SHORT ARM MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS, Inventors: Anthony Charles Bonora, Ser. No. 769,850, Filed: Aug. 26, 1985, now U.S. Pat. No. 4,674,936.
CONTAINER HAVING DISPOSABLE LINERS, Inventors: Mihir Parikh, Anthony Charles Bonora, W. George Faraco, Barney H. Huang, Ser. No. 8,329,447 Filed: Feb. 13, 1986.
The present invention relates to standardized mechanical interface (SMIF) systems for reducing particle contamination and more particularly to transportable containers apparatus which are hermetically sealable.
A standardized mechanical interface (SMIF) has been proposed by the Hewlett-Packard Company as disclosed in U.S. Pat. Nos. 4,532,970 and 4,534,389. The purpose of the SMIF system is to reduce particle fluxes onto wafers. This end is accomplished by mechanically ensuring that during transportation, storage and processing of the wafers, the gaseous media (such as air or nitrogen) surrounding the wafers is essentially stationary relative to the wafers and by ensuring that particles from the ambient environment do not enter the immediate wafer environment.
The SMIF system above consists of two parts: (1) a controlled environment including a clean process equipment canopy surrounding the wafer-handling mechanism of each processing machine, and (2) a small, clean box having a quiet internal environment for carrying wafers from processing machine to processing machine.
Systems of the above type are concerned with particle sizes which range from below 0.1 micrometers to above 200 micrometers. Particles with these sizes can be very damaging in semiconductor processing because of the small geometries employed in fabricating semiconductor devices. Typical semiconductor processes today employ geometries which are 1 micrometer and under. Unwanted contamination particles which have geometries measuring greater than 0.1 micrometer substantially interfere with 1 micrometer geometry semiconductor devices. The trend, of course, is to have smaller and smaller semiconductor processing geometries which today in research and development labs approach 0.1 micrometer and below. In the furture, geometries will become smaller and smaller and hence smaller and smaller contamination particles become of interest.
In typical processing environments today, "clean rooms" are established in which through filtering and other techniques, attempts are made to remove particles having geometries greater than 0.03 micrometers and above. There is a need, however, to improve the processing environment. In a clean room, wafers and other semiconductor processing articles are exposed to the full clean room environment. Since different people, different types of equipment and materials are also present in the clean room environment, the clean room cannot be maintained as particle free as desired. It is virtually impossible to maintain clean rooms free of particles of a 0.1 micrometer size and below.
For this reason, systems such as the SMIF system have come under consideration. The proposed SMIF system, however, has some deficiencies. When SMIF boxes become contaminated, it is very difficult to remove small contaminant particles since the force of attraction of small particles to surfaces of the equipment is very high. When small particles become attached to a surface such as a SMIF box, they are not effectively removed by filtration techniques. Circulating and filtering air or other gas within a box does not readily remove the contamination particles which are attracted and held in contact with surfaces. However, whenever an object such as a SMIF box is disturbed, by bumping for example, many small particles are freed from the surface and find their way as contaminants onto any semiconductor or other article which is present in the box. While scrubbing and washing techniques have been developed for removing small particles from equipment and surfaces, these processes tend to be cumbersome and furthermore are not entirely effective.
There have since been sealable transportable containers such as one described in U.S. Pat. No. 4,434,891, which discloses a container for a magnetic disc pad eye. That container included a top portion having a screw and therefore requiring manual means to remove the contents from the box interior space.
Previous SMIF concepts have included the principle that the wafers move from the transportable container to the processing equipment through various apparatus by disturbing the least amount of air within the processing equipment. Thus the still air concept has prevaded prior SMIF transportable containers. The advantage of this is that any particulates in the air would not damage semiconductor wafers because the air remained relatively still during the transferring process. While this principle is still valid, it has been found that stagnant air too, has many particles which may also cause damage simply by static attraction. The recognition that stagnant air causes contamination and damage has created a need for active localized filtering of the SMIF box and the environments with which the semiconductor articles are exposed. This recognition is a departure from the previous SMIF concept which employed no active filtering means. The need for active filtering at localized areas and under specific conditions and at desired times has been left to this invention.
In accordance with the above background, there is a need for an improved system which can be standardized and which is effective for reducing contamination using an active filtering system.
The present invention is a transportable container which provides a clean environment for articles to be processed and which employs an active filtering system in localized areas to facilitate cleaning of the container and surrounding environments. The container is used particularly in connection with semiconductor processing equipment which also provides a clean environment and which can be cleaned locally as well. The container is also used to store articles before and after processing. The container is adapted to receive a holder such as a wafer cassette holder for holding one or more articles such as semiconductor wafers.
It is a general object of this invention to provide a sealable transportable container in which the interior environment may be actively filtered as desired.
It is a further object of this invention to provide a sealable transportable container which is cleaned by alternatively pressurizing and evacuating the container through filter means.
It is a further object of this invention to provide a transportable container in which air may be circulated throughout the interior of the container without opening the container.
It is a further object of this invention to provide a port plate having an injector/extractor which has localized intelligence such that it can be actuated to either pressurize or evacuate at appropriate times.
It is a further object of this invention to provide a sealable transportable container as set forth above which includes means for sensing the quality and pressure of the interior space of the container.
It is a further object of this invention to provide a transportable container as set forth above which enhances the SMIF still air concept by matching environments as the wafers are transferred from one location to another.
In a first embodiment of this invention, the transportable container is used with processing equipment having a port plate and a port door sealably mating to the port plate, the container comprises a box defining an interior space for containing articles, such as semiconductor wafers. The box includes conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering particles from fluids passing through the conduit. The box includes a box top having first and second box top sealing surfaces and a box door having a first box door sealing surface sealably mating with the first box top sealing surface for making a first seal. The port plate having first and second port plate sealing surfaces sealably mating with the second box top sealing surface for making a second seal. The port door having a first port door sealing surface for sealably mating with the second port plate sealing surface for making a third seal. Box door latch means for latching the box door to the box top, whereby said first seal is made and released by operation of the box door latch means. The port door includes means for activating the box door latch means. The conduit is connected to structure for moving fluids into and out of the box through the filter. Whereby, upon activation of the structure for moving fluids, the interior space is cleaned by being alternatively evacuated and pressurized.
In a preferred embodiment, the box is hermetically sealable and includes activatable circulation means within the box top for circulating air within the interior space. The box top further includes filtering means for filtering air being circulated in the interior space, whereby upon activation of the circulation means, the filtration means traps particles in the interior space thereby cleaning the interior space.
A preferred embodiment of the transportable container in accordance with this invention includes the box top having conduit means for communicating between the interior space and the port plate. The port plate includes conduit means for communicating with the box top conduit means and for sealably mating with an injector/extractor which may be activated to alternately pressurize or evacuate the interior space through a filter in the box top conduit means, thereby cleaning the interior space as it is alternately pressurized and evacuated.
In another preferred embodiment, the box door includes the conduit means for communication between the interior space and the port door, and also includes conduit means for communication with the box door conduit means and further includes means for sealably connecting an injector/extractor. The box door conduit means includes filtering means, whereby upon activation of the injector/extractor the interior space may be evacuated and pressurized through the filtering means, thereby trapping particles and cleaning the interior space.
Thus, it is an advantage of the present invention that the interior space of the transportable container may be cleaned while articles are present within the interior space.
It is a further advantage of the invention to be able to pressurize the interior space to match the pressure of the environment of the processing equipment.
It is a further advantage of the invention to be able to activate a pressurization or evacuation activation means for dynamically cleaning the interior space of the container during the processing of the articles.
These and other objects and advantages of the invention will appear more clearly from the following description in which the preferred embodiments of the invention have been set forth in detail in conjunction with the drawings.
FIG. 1 depicts a prospective view of the SMIF system positioned in use with processing equipment.
FIG. 2 is a schematic representation of one alternative SMIF container in accordance with this invention, shown with the processing equipment of FIG. 1.
FIG. 3 depicts a prospective view of an hermetically sealable container with a port plate having an injector/extractor means, all in accordance with the present invention.
FIG. 4 is a cross sectional view of the embodiment of FIG. 3 of the hermetically sealable container in accordance with this invention taken along lines 4--4 in the direction of the arrows.
FIG. 5 is another elevated side of the container of FIG. 4 illustrating the box latch means.
FIGS. 6 and 7 are cross sectional views of another embodiment of the container of FIG. 3 taken along lines 4--4 in the direction of arrows illustrating inflatable sealing means.
FIG. 8 is an exploded perspective view of an alternate embodiment of the container in accordance with this invention.
FIG. 9 is a cross sectional view of the container of FIG. 8 taken along lines 9--9 in the direction of the arrows.
FIG. 10 is an elevated side view of another alternative embodiment of the sealable container in accordance with this invention.
FIG. 11 is a partial sectional enlarged view taken along lines 11--11 in the direction of the arrows illustrating particle collectors.
FIG. 12 illustrates another alternative embodiment of the container in accordance with this invention having a liner.
FIG. 13 illustrates yet another embodiment of a container in accordance with this invention having separate inlet and outlet and a closed to filtering system.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS:
Referring to the Drawings, wherein like-reference characters designate like or corresponding parts throughout the several views and referring particularly to FIG. 1, there is shown a canopy 10 which is an easily removable shield that covers the wafer handing mechanism of the processing equipment 12. Equipment 12 is a photo resist applicator, mask aligner, inspection station or any similar processing equipment. The canopy 10 is constructed of transparent plastic, such as acrylic or Lexan to facilitate inspection and/or maintenance within the canopy 10. The canopy 10 encloses the handling mechanisms of the processing equipment 12 and a holder 14, such as a wafer cassette holding wafers 16. The environment within the processing equipment is separately maintained and separately cleaned and therefore the equipment 12 need not be installed in a clean room.
FIG. 2 shows further details of the apparatus of FIG. 1. A container in accordance with this invention, generally shown by the numeral 18 comprises a box 20 mounted on the horizontal surface 22 of canopy 10 by means of a port assembly 24 and specifically, port plate 26. The port assembly 24 further includes a port door 28 and an elevator mechanism 30 that transports a cassette holder 14, containing the integrated circuit wafers 16 from the box 20 into the region beneath the canopy 10. In FIG. 2, the port door 28 and a box door 32 are shown in the closed position by the dotted lines. A mover assembly 34 includes a platform 36, a shaft engagement means 38 and a drive motor 40. The platform 36, extending from the elevator assembly 30, carries the port door 28, the box door 32 and the holder 14 in a vertical direction. The platform 36 is attached by engagement means 38 to a vertical guide 42 of elevator assembly 30.
Typically, guide 42 includes a lead screw (not shown) and the drive motor 40 drives a gear (not shown) which engages the lead screw for driving the platform 36 up or down. When the platform 36 is driven to the closed position, the port door 28 closes the port opening in the canopy 10.
In a similar manner, a manipulator assembly shown generally by the numeral 44 is fastened to a platform 46 which has an engagement means 48 for engaging the vertical guide 42. Manipulator assembly 44 includes a manipulator arm 50 and an engagement head 52 adapted to engage holder 14. By vertical operation of the platforms 36 and 46 and by operation of the manipulator assembly 44, the holder 14 is moved from its position on the box door 32 to a position on the equipment station 13 (as shown by the broken lines).
In FIG. 3 there is shown an exploded view of a first embodiment of a container and port door assembly in accordance with this invention generally indicated by the numerals 60 and 80, respectively. The container 60 comprises a box 62 which is hermetically sealable. The box 62 can be alternately pressurized or evacuated as will be explained more fully below. The box 62 includes a box top 64 and a box door 66. The port assembly 80 includes a port plate 82 and a port door 84. The port plate 82 is connectable to a coaxial injector/extractor 100 at gas transfer valve 68.
The box door 66 includes box door latch means 70. The port door 84 includes pins 86 for actuating the box door latch means 70 and thereby releasing the box door 66 which contains the wafer 16. In this way, the wafers 16 can be moved by elevator mechanism 30 and mover assembly 34 into the proper position in the processing equipment 12 for processing without the need for human intervention.
In FIG. 4, the container 60 is shown in relation to processing equipment 12. The container 60 is designed for sealably mating with the port assembly 80. The box top 64 has a first and second box top sealing surfaces 72 and 74 respectively. The box door 66 has a first box door sealing surface 76 for sealably mating with the first box top sealing surface 72 and thereby making a first seal 73.
The port plate 82 has first and second port plate sealing surfaces 88 and 90 respectively. The first port plate sealing surface 88 sealably mates with the second box top sealing surface 74 making a second seal 75.
The port door 84 has a first port door sealing surface 92 which sealably mates with the second port plate sealing surface 90 thereby making a third seal 77. The box top 64 further includes a conduit means defining a channel 78 between valve 68 and the interior space 61 of box 62. At one end of the channel 78 is a filtering means 79 for filtering fluids passing therethrough. The filtering means 79 comprises a membrane filter which is particularly effective at trapping small particles.
When all the three seals 73, 75 and 77 are made the box 20 interior space 61 may be cleaned by alternatively evacuating and pressurizing the box 20. In order to evacuate the interior space 61, the injector/extractor 100 is activated to withdraw fluid from the interior space 61. As the fluid is withdrawn, it passes through membrane filter 79, through channel 78 and through a coaxial valve of injector/extractor 100. When a vacuum is created in interior space 61 the process is complete. Using the container of the present invention, a vacuum of between 90-99% has been found possible. After the fluid has been cleaned in the interior space 61 it may then be pumped back into the interior space again through filter 79. The membrane filter 79 keeps the particles within it, even upon pressurization.
During pressurization and evacuation of the container 60, it is preferable that the free flow of air be from the front of the wafers to the back of the wafers to cause the least amount of flux onto the wafers 16.
In FIG. 4, the first, second and third seals 73, 75 and 77, respectively, are all made by use of an O-ring. Further in FIG. 4 it is shown that the injector/extractor 100 is also sealably inserted within port plate 82 by the use of O-rings 136. In order to minimize cost it has been found that the box 62 should be slightly dome and made of a strong plastic material which can withstand 15 PSI differential. The injector/extractor 100 is activated through activation means 104 located in the port assembly 80.
In FIG. 5, the box door latch means 70 are shown in detail. The latch means 70 are actuated by port door pins 86 in the same manner as previously described with reference to U.S. Pat. Ser. No. 635,384, which is incorporated herein by reference.
The container in accordance with this invention has the advantage of being able to match environments. The interior space 61 defines a first environment 110 as shown in FIG. 2. A second environment 112 is defined by the interior of the processing equipment 12. A third environment 114 is defined by the space external the container 60 and the processing equipment 12. Prior to the box door 66 being opened, the first environment 110 may be adjusted both as to pressure and as to cleanliness as described above. The second environment 112 may be similarly adjusted when a second injector/extractor 102 is connected to the processing equipment 12. Thus, first and second environments 110 and 112, respectively may then be matched both as to cleanliness and as to pressure. Further when the box door 66 is opened, exposing the wafers 16 to the second environment 112, the pressure and cleanliness may be matched to promote still air transfer of the wafers 16 within the processing equipment 12. Thus the still air wafers concept forth in U.S. Pat. Nos. 4,532,970 and 4,534,389 is enhanced by the present invention.
After processing of the wafers 16, the wafers are reinserted into environment 110. The wafers may then be carried in container 60 through third environment 114 without threat of contamination because of the sealed nature of container 60. Thus, the third environment 114 may be contaminated with many particles without adversely affecting the first environment 110 and thereby wafers 16.
The opening of the box door 66 may be synchronized with the evacuation or pressurization of the container 60. It may be desirable for example to pressurize the first and second environments to 15 PSI prior to the opening of the box door. As explained above the pressure of the environments may be matched using the present invention.
It may be desirable to have the wafers 16 move within the processing equipment with the processing equipment 12 having zero pressure or being in vacuum. Again, environments 110 and 112 may be matched to facilitate still air transfer.
The box top 64 is provided with a sensor 120 which senses both the quality of environment 110 as well as the pressure of environment 110. Similarly, processing equipment 12 is provided with a sensor 122 which senses the pressure and type of environment within the second environment 112. A further discussion of the principles of sensoring the environment 110 is found below with respect to FIG. 13.
In FIG. 13, box 62 is provided with a closed system 160 for filtering and analyzing having an inlet 164 and outlet 166. Clean air or free N2 is pumped by pump P into the interior space 61, circulated through conduit tubing 168 and then exhausted through an outlet. A filter 170 for trapping any particles in the interior space 61 is provided at the outlet 166. Additionally the inlet could also have a filter. Each of the inlet 164 and outlet 166 are one-way valves so that unwanted fluids can not enter the first environment 110. Closed system 160 includes sensor 172 and 174. The sensors 172 and 174 also include attachment to a source of dry nitrogen when it is desirable to pump nitrogen through the closed system 160. The sensors analyze the gas or fluid in interior space 61 both quantitatively and qualitatively. Thus the type of environment including pressure and content can be measured using the container in accordance with this invention.
In FIG. 12, the container 60 is shown having a liner 180, similar to the container described with respect to earlier filed U.S. patent application Ser. No. 829,447, filed Feb. 13, 1986 entitled "CONTAINERS HAVING DISPOSALBE LINERS", Invented by Mikir Parikh, Anthony Charles Bonora, W. George Faraco and Barney H. Huang, which is incorporated herein by reference. The liner 180 in the interior space 61. As air in the space 61 is placed in motion it flows through the channel 182 created by the space between the liner 180 and the box top 64. An indentation 184 is provided in the box top 64 creating a further means for directing the air flow in box 62. During injection air follows the general flow indicated by the arrows. Of course upon pressurization, the opposite direction of the arrow would indicate the general air flows. The air flow through a membrane filter 184 seated on top of the liner 180. The filter 184 filters even small particles. The filter 184 is seated on top of the liner 180 so as to provide space between the filter 184 and the box top 64 so that air can flow through that space.
In FIGS. 2, 6 through 9 there is shown another alternative embodiment of a transportable container 60', in accordance with this invention. The container 60', is shown an exploded view in FIG. 8. This embodiment of the present invention is identical to the earlier described embodiment with respect to FIGS. 3 through 5 with the exceptions noted below.
The container 60' comprises a box 62 defining an interior space 61 for containing the wafer 16. The box includes a box top 64 having a slightly domed shape and having walls capable of withstanding a 15 PSI pressure differential. The box 62 also includes a box door 66 having conduit means 78 for communication between the interior space and the port door 84. The conduit means 78 defines a channel.
The box top 64 has first and second box top sealing surfaces 72 and 74, respectively. The box door 66 has a first box door sealing surface 76 which sealably mates with first box top sealing surface 72 making a first seal 73.
The port plate 82 has first and second port plate sealing surfaces 88 and 90, respectively. The first port plate sealing surface 88 sealably mates with the second box top sealing surface 74 for making a second seal 75. The port door 84 has a first port door sealing surface 92 which sealably mates with second port plate sealing surface 90 for making a third seal 77. The port door 84 further includes conduit means defining a channel 94 for communication between the box door 66 and the second environment 112. The box door 66 has conduit means 95 for communication between the space 97 between the port door 84 and box door 66. Using conduit 95 the space 97 may alternatively be evacuated or pressurized with the environments 110 and 112.
In the embodiment shown in FIGS. 2, 6 through 9, the processing equipment 12 includes an injector/extractor 100 connectable through the box door 66. The injector/extractor 100 is connected to the port channel 94 by an umbilical cord 106. The umbilical cord 106 is flexible and moves with the vertical movement of elevator assembly 30 without tangling in the manipulator assembly 50. Similar to earlier embodiment described with respect to FIGS. 3 and 4, this embodiment can also be evacuated and pressurized in a similar manner. In this embodiment, the pressure of the container 60' in combination with the mating of injector/extractor valve 101 upon check valve 98 causes the valve to become activated when the pump P (FIG. 2) is in the "on" position. This embodiment therefore defines a passive system of evacuation and pressurization as compared with the embodiments described with reference to FIGS. 4 and 5, where the pressurization/evacuation occurs by actively switching on the activation means 104.
In FIGS. 6 and 7, there is shown an alternate sealing structure for sealing the container 60' against port plate 82. The port plate 82 has an internal grove 83 around its inside perimeter. An inflatable seal 130 fits snugly into 9 grove 83. The inflatable seal 130 is connected to a pump (not shown) by conduit 132. After the container 60' has been placed in processing equipment 12, the pump is activated and the seal inflated. To remove the container 60', the seal is deflated and the container 60' released.
In FIG. 10 there is shown another alternative embodiment of a transportable container 60. In this embodiment particle reduction is accomplished by inducing air circulation within container 60 and trapping particles in a particle gathering element in the interior space. The container 60 comprises an hermetically sealable box 140 defining an interior space 141 for containing the wafers 16. The box 140 includes a box top 142 having first and second box top sealing surfaces 144 and 146 respectively. The box top further includes activatable means for circulating fluid within the interior space definingan absorption plate 148. The box top 142 further includes a particle gathering element 150 for filtering the fluid activated by the absorption plate 148. As shown by the dotted lines, an additional or alternate particle gathering element may be at the top of box 140. It is preferably to have the particle gathering element 150 located on the side of the box top to promote more effective particle gathering. The box 140 includes a box door 152 which has a first box door sealing surface 154 which sealably mates with first box top sealing surface 144 for making a first seal 156.
The container 60 is similar to the previously disclosed embodiments of a transportable container inasmuch as it is designed to work in conjunction with port assembly 80. Like the previously described embodiments, the port plate 82 has first and second port plate sealing surfaces 88 and 90, respectively. The first port plate sealing surface 88 sealably mates with the second box top sealing surface 146 for creating a second seal 75. The port door 84 has a first port door sealing surface 92 which sealably mates with second port plate sealing surface 90 for making a third seal 77. In operation, the box door opens and closes as described with respect to the earlier embodiments in FIGS. 3 through 9.
The absorption plate 148 is heated by direct infrared energy supplied by infrared energy source 158. The infrared energy source is a thermal source which applies heat to the absorption plate 148. The absorption plate 148 in turn heats the interior space 141 at the area closely proximate thereto. The absorption plate 148 is located within the box top 142 and adjacent the box door 152. Thus as the air in the interior space 141 is heated at the bottom, it rises creating a convection current which causes air to circulate through the box top filter 150. It has been found that the absorption plate 148 need only be heated several degrees above the ambient to create this local convection current. As the warmer air rises, it is cooled by the walls of the box top and thereby sustains a continuous circulation. It is expected that circulation rates of several turns per minute can be achieved without raising the temperature of the interior space 141 more than a few degrees above ambient. As the air circulates the particles in the interior space 141 are trapped in the filter 150.
In FIG. 11, the particle gathering element 184 is shown in detail. The element 184 includes fins 186 which gather particles as the air circulates within the box 140. The pins 186 are positioned such that they do not severely interface with the flow of air.
While the invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in form and detail may be made therein without departing from the spirit and scope of the invention.
Patent CitationsCited PatentFiling datePublication dateApplicantTitleUS3888556 *Nov 30, 1973Jun 10, 1975British Nuclear Fuels LtdGlove boxes and similar containmentsUS4047624 *Oct 21, 1975Sep 13, 1977Airco, Inc.Workpiece handling system for vacuum processingUS4278380 *Apr 30, 1979Jul 14, 1981Varian Associates, Inc.Lock and elevator arrangement for loading workpieces into the work chamber of an electron beam lithography systemUS4359330 *Mar 12, 1981Nov 16, 1982Donaldson Company, Inc.Self-cleaning pulsed air cleaner with integral precleanerUS4434891 *Mar 18, 1983Mar 6, 1984M.U. Engineering & Mfg., Inc.Disc packageUS4532970 *Sep 28, 1983Aug 6, 1985Hewlett-Packard CompanyParticle-free dockable interface for integrated circuit processingUS4534389 *Mar 29, 1984Aug 13, 1985Hewlett-Packard CompanyInterlocking door latch for dockable interface for integrated circuit processingUS4540326 *Sep 17, 1982Sep 10, 1985Nacom Industries, Inc.Semiconductor wafer transport systemUS4558982 *Jun 27, 1984Dec 17, 1985The United States Of America As Represented By The Secretary Of The United States Department Of EnergyEvacuate and backfill apparatus and methodUS4592306 *Nov 30, 1984Jun 3, 1986Pilkington Brothers P.L.C.Apparatus for the deposition of multi-layer coatingsUS4616683 *Apr 8, 1985Oct 14, 1986Hewlett-Packard CompanyParticle-free dockable interface for integrated circuit processingUS4674936 *Aug 26, 1985Jun 23, 1987Asyst TechnologiesShort arm manipulator for standard mechanical interface apparatusUS4674939 *Jul 30, 1984Jun 23, 1987Asyst TechnologiesSealed standard interface apparatusUS4676709 *Aug 26, 1985Jun 30, 1987Asyst TechnologiesLong arm manipulator for standard mechanical interface apparatusJPS564244A * Title not available* Cited by examinerReferenced byCiting PatentFiling datePublication dateApplicantTitleUS4804086 *Dec 16, 1987Feb 14, 1989Siemens AktiengesellschaftTransport container with an interchangeable inside containerUS4851018 *Nov 20, 1987Jul 25, 1989Commissariat A L'energie AtomiqueInstallation for the storage and transfer of objects in a very clean atmosphereUS4907526 *Jul 12, 1988Mar 13, 1990Leybold AktiengesellschaftInstallation for charging and discharging substrates out of a vacuum tankUS4923054 *Nov 22, 1988May 8, 1990Dainippon Screen Mfg. Co., Ltd.Wafer transfer apparatus having an improved wafer transfer portionUS4963069 *Nov 6, 1987Oct 16, 1990Meissner & Wurst Gmbh & Co.Container for the handling of semiconductor devices and process for particle-free transferUS4995430 *May 19, 1989Feb 26, 1991Asyst Technologies, Inc.Sealable transportable container having improved latch mechanismUS5036894 *Jan 18, 1990Aug 6, 1991Matcom LimitedMaterial handling systemUS5056875 *Mar 20, 1989Oct 15, 1991Motorola, Inc.Container for use within a clean environmentUS5058491 *Aug 27, 1990Oct 22, 1991Taiwan Semiconductor Manufacturing Company, Ltd.Building and method for manufacture of integrated circuitsUS5098245 *Nov 5, 1990Mar 24, 1992U.S. Philips CorporationHigh speed wafer handlerUS5112277 *Feb 28, 1991May 12, 1992Commissariat A L'energie AtomiqueBlowing door for ultra-clean confinement containerUS5137063 *Feb 5, 1990Aug 11, 1992Texas Instruments IncorporatedVented vacuum semiconductor wafer cassetteUS5139459 *Feb 28, 1991Aug 18, 1992Tdk CorporationClean transfer method and system thereforUS5169272 *Nov 1, 1990Dec 8, 1992Asyst Technologies, Inc.Method and apparatus for transferring articles between two controlled environmentsUS5217053 *May 18, 1992Jun 8, 1993Texas Instruments IncorporatedVented vacuum semiconductor wafer cassetteUS5255783 *Dec 20, 1991Oct 26, 1993Fluoroware, Inc.Evacuated wafer containerUS5271516 *Sep 24, 1992Dec 21, 1993International Business Machines CorporationIsolation structure for contamination sensitive itemsUS5291923 *Sep 24, 1992Mar 8, 1994Internatinal Business Machines CorporationDoor opening system and methodUS5291925 *Sep 15, 1992Mar 8, 1994Piero MarrucchiEquipment for forming temporary connections for the transfer of objects between discontinuous confined volumesUS5295522 *Sep 24, 1992Mar 22, 1994International Business Machines CorporationGas purge system for isolation enclosure for contamination sensitive itemsUS5320218 *Apr 5, 1993Jun 14, 1994Shinko Electric Co., Ltd.Closed container to be used in a clean roomUS5332013 *Mar 13, 1992Jul 26, 1994Shinko Electric Co., Ltd.Unmanned conveying device in clean roomUS5339952 *Jun 19, 1992Aug 23, 1994International Business Machines CorporationTransfer container for transferring flimsy circuit panels under clean room conditionsUS5350336 *Apr 23, 1993Sep 27, 1994Industrial Technology Research InstituteBuilding and method for manufacture of integrated semiconductor circuit devicesUS5363867 *Jan 21, 1993Nov 15, 1994Shinko Electric Co., Ltd.Article storage house in a clean roomUS5364219 *Jun 23, 1992Nov 15, 1994Tdk CorporationApparatus for clean transfer of objectsUS5364225 *Jun 19, 1992Nov 15, 1994IbmMethod of printed circuit panel manufactureUS5382127 *Aug 3, 1993Jan 17, 1995International Business Machines CorporationPressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipmentUS5388945 *Aug 3, 1993Feb 14, 1995International Business Machines CorporationFully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containersUS5390785 *Aug 3, 1993Feb 21, 1995International Business Machines CorporationPressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environmentUS5395198 *Jun 19, 1992Mar 7, 1995International Business Machines CorporationVacuum loading chuck and fixture for flexible printed circuit panelsUS5433574 *Dec 27, 1994Jul 18, 1995Shinko Electric Co., Ltd.Gas purge unit for a portable containerUS5451131 *Jun 19, 1992Sep 19, 1995International Business Machines CorporationDockable interface airlock between process enclosure and interprocess transfer containerUS5482161 *May 24, 1994Jan 9, 1996Fluoroware, Inc.Mechanical interface wafer containerUS5509772 *Oct 6, 1993Apr 23, 1996Commissariat A L'energie AtomiqueSystem for the handling and confinement of flat objects in individual boxesUS5538390 *Oct 29, 1993Jul 23, 1996Applied Materials, Inc.Enclosure for load lock interfaceUS5547328 *Sep 1, 1994Aug 20, 1996Asyst Technologies, Inc.Method and apparatus for transferring articles between two controlled environmentsUS5562383 *Jan 5, 1996Oct 8, 1996Tokyo Electron Kabushiki KaishaTreatment apparatusUS5575081 *Jul 25, 1994Nov 19, 1996Jenoptik GmbhDevice for transporting magazines for molding wafer-shaped objectsUS5586585 *Feb 27, 1995Dec 24, 1996Asyst Technologies, Inc.Direct loadlock interfaceUS5588789 *Jul 6, 1995Dec 31, 1996Brooks AutomationLoad arm for load lockUS5607276 *Jul 6, 1995Mar 4, 1997Brooks Automation, Inc.Batchloader for substrate carrier on load lockUS5609459 *Jul 6, 1995Mar 11, 1997Brooks Automation, Inc.Door drive mechanisms for substrate carrier and load lockUS5613821 *Jul 6, 1995Mar 25, 1997Brooks Automation, Inc.Cluster tool batchloader of substrate carrierUS5626820 *Dec 2, 1993May 6, 1997Kinkead; Devon A.Clean room air filteringUS5644855 *Apr 6, 1995Jul 8, 1997Air Products And Chemicals, Inc.Cryogenically purged mini environmentUS5653565 *Jul 5, 1995Aug 5, 1997Asyst Technologies, Inc.SMIF port interface adaptorUS5660517 *Mar 31, 1995Aug 26, 1997Semitool, Inc.Semiconductor processing system with wafer container docking and loading stationUS5664925 *Jan 27, 1997Sep 9, 1997Brooks Automation, Inc.Batchloader for load lockUS5674039 *Aug 21, 1996Oct 7, 1997Fusion Systems CorporationSystem for transferring articles between controlled environmentsUS5715659 *Feb 3, 1997Feb 10, 1998The West Company, IncorporatedTransfer system for transferring objects into a barrier isolatorUS5740845 *Jul 7, 1995Apr 21, 1998Asyst TechnologiesSealable, transportable container having a breather assemblyUS5746008 *Feb 24, 1997May 5, 1998Shinko Electric Co., Ltd.Electronic substrate processing system using portable closed containersUS5752796 *Jan 24, 1996May 19, 1998Muka; Richard S.Vacuum integrated SMIF systemUS5799464 *Sep 6, 1996Sep 1, 1998Astra AktiebolagAseptic transferUS5806574 *Dec 1, 1995Sep 15, 1998Shinko Electric Co., Ltd.Portable closed containerUS5810062 *Jul 12, 1996Sep 22, 1998Asyst Technologies, Inc.Two stage valve for charging and/or vacuum relief of podsUS5829939 *Jun 24, 1996Nov 3, 1998Tokyo Electron Kabushiki KaishaTreatment apparatusUS5833726 *May 26, 1995Nov 10, 1998Extraction System, Inc.Storing substrates between process steps within a processing facilityUS5836736 *Aug 15, 1996Nov 17, 1998Semitool, Inc.Semiconductor processing system with wafer container docking and loading stationUS5843196 *Jan 21, 1997Dec 1, 1998International Business Machines CorporationUltra-clean transport carrierUS5870886 *Oct 9, 1997Feb 16, 1999The West Company, IncorporatedTransfer system for transferring objects into a barrier isolatorUS5879458 *Sep 13, 1996Mar 9, 1999Semifab IncorporatedMolecular contamination control systemUS5944602 *Sep 9, 1997Aug 31, 1999Tumi Manufacturing, Inc.Portable cleanroom cabinet assemblyUS5967571 *Oct 13, 1995Oct 19, 1999Empak, Inc.Vacuum actuated mechanical latchUS6042651 *Jan 29, 1999Mar 28, 2000Semifab IncorporatedMolecular contamination control systemUS6045620 *Jul 11, 1997Apr 4, 2000Applied Materials, Inc.Two-piece slit valve insert for vacuum processing systemUS6048154 *Oct 2, 1996Apr 11, 2000Applied Materials, Inc.High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lockUS6116461 *May 29, 1998Sep 12, 2000Pyxis CorporationMethod and apparatus for the dispensing of drugsUS6120229 *Feb 1, 1999Sep 19, 2000Brooks Automation Inc.Substrate carrier as batchloaderUS6120371 *Oct 21, 1998Sep 19, 2000Semifab IncorporatedDocking and environmental purging system for integrated circuit wafer transport assembliesUS6164664 *Mar 27, 1998Dec 26, 2000Asyst Technologies, Inc.Kinematic coupling compatible passive interface sealUS6221163Dec 14, 1999Apr 24, 2001Semifab IncorporatedMolecular contamination control systemUS6254328Jun 15, 1999Jul 3, 2001Applied Materials, Inc.High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lockUS6284020 *Dec 2, 1998Sep 4, 2001Kabushiki Kaisha ToshibaMethod of maintaining cleanliness of substrates and box for accommodating substratesUS6319297 *Mar 27, 1998Nov 20, 2001Asyst Technologies, Inc.Modular SMIF pod breather, adsorbent, and purge cartridgesUS6338007Jun 7, 2000Jan 8, 2002Pyxis CorporationSystem and apparatus for the storage and dispensing of itemsUS6364922Jul 6, 2000Apr 2, 2002Ebara CorporationSubstrate transport containerUS6368372 *Aug 8, 2000Apr 9, 2002Intrabay Automation, Inc.Fluid media particle isolating systemUS6368411Feb 21, 2001Apr 9, 2002Semifab IncorporatedMolecular contamination control systemUS6393334Sep 17, 1999May 21, 2002Honeywell International Inc.Method and apparatus for processing tool interface in a manufacturing environmentUS6418979Sep 17, 1999Jul 16, 2002Mid-America Commercialization CorporationMethod and apparatus for processing tool interface in a manufacturing environmentUS6427096Feb 12, 1999Jul 30, 2002Honeywell International Inc.Processing tool interface apparatus for use in manufacturing environmentUS6533000 *Apr 11, 2001Mar 18, 2003Sony CorporationSubstrate transportation containerUS6540803 *Mar 12, 2002Apr 1, 2003Intrabay Automation, Inc.Fluid media particle isolating systemUS6591162Aug 16, 2000Jul 8, 2003Asyst Technologies, Inc.Smart load port with integrated carrier monitoring and fab-wide carrier management systemUS6641349 *Dec 29, 1999Nov 4, 2003Tdk CorporationClean box, clean transfer method and systemUS6646720 *Sep 21, 2001Nov 11, 2003Intel CorporationEuv reticle carrier with removable pellicleUS6655759 *Feb 19, 2002Dec 2, 2003Giuseppe SaccaContainer assembly for use with a rapid transfer portUS6761526 *Dec 18, 2002Jul 13, 2004Mirae CorporationPicking apparatus for semiconductor device test handlerUS6790763Dec 4, 2001Sep 14, 2004Ebara CorporationSubstrate processing methodUS6796763 *Jun 23, 2003Sep 28, 2004Tdk CorporationClean box, clean transfer method and systemUS6828225Feb 27, 2004Dec 7, 2004Ebara CorporationSubstrate processing methodUS6833035May 22, 2000Dec 21, 2004Semitool, Inc.Semiconductor processing system with wafer container docking and loading stationUS6875282May 16, 2002Apr 5, 2005Ebara CorporationSubstrate transport containerUS6883539Sep 24, 2003Apr 26, 2005Kabushiki Kaisha ToshibaWafer containerUS6901971Jan 8, 2002Jun 7, 2005Entegris, Inc.Transportable container including an internal environment monitorUS6926029Dec 8, 2004Aug 9, 2005Kabushiki Kaisha ToshibaWafer containerUS6960257May 7, 2003Nov 1, 2005Semitool, Inc.Semiconductor processing system with wafer container docking and loading stationUS7040504Jan 7, 2002May 9, 2006Cardinal Health 301, Inc.System and apparatus for the dispensing of drugsUS7080652Sep 14, 2004Jul 25, 2006Semitool, Inc.Automated semiconductor processing systemsUS7156129 *Jun 7, 2005Jan 2, 2007Entegris, Inc.Transportable container including an internal environment monitorUS7223690Oct 29, 2004May 29, 2007Ebara CorporationSubstrate processing methodUS7314068Apr 20, 2005Jan 1, 2008Miraial Co., Ltd.Apparatus for replacing gas in storage container and method for replacing gas therewithUS7328727Apr 17, 2005Feb 12, 2008Entegris, Inc.Substrate container with fluid-sealing flow passagewayUS7360346Sep 24, 2004Apr 22, 2008Tdk CorporationPurging system and purging method for the interior of a portable type hermetically sealed containerUS7416998Feb 27, 2003Aug 26, 2008Kondoh Industries, Ltd.Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment systemUS7490637Jan 3, 2007Feb 17, 2009Entegris, Inc.Transportable container including an internal environment monitorUS7523769Oct 25, 2005Apr 28, 2009Tdk CorporationEnclosed container lid opening/closing system and enclosed container lid opening/closing methodUS7630789Oct 11, 2005Dec 8, 2009CareFusion 303 Inc.System and apparatus for the dispensing of drugsUS7654291Apr 28, 2004Feb 2, 2010Tdk CorporationPurging apparatus and purging methodUS7674083May 11, 2004Mar 9, 2010Tdk CorporationClean device with clean box-opening/closing deviceUS7806643Aug 23, 2005Oct 5, 2010Brooks Automation, Inc.Elevator-based tool loading and buffering systemUS8146623Feb 28, 2008Apr 3, 2012Entegris, Inc.Purge system for a substrate containerUS8234002 *Feb 20, 2009Jul 31, 2012Tdk CorporationClosed container and control system for closed containerUS8286672Jun 3, 2008Oct 16, 2012Gudeng Precision Industrial Co., Ltd.Gas filling apparatusUS8286674 *Nov 18, 2008Oct 16, 2012Gudeng Precision Industrial Co., Ltd.Gas filling apparatusUS8424703May 1, 2009Apr 23, 2013Brooks Automation, Inc.Substrate container sealing via movable magnetsUS8446570Sep 15, 2010May 21, 2013Asml Holding N.V.System and method for using a two part cover and a box for protecting a reticleUS8678734Oct 4, 2010Mar 25, 2014Brooks Automation, Inc.Elevator-based tool loading and buffering systemUS8727125Feb 5, 2008May 20, 2014Entegris, Inc.Substrate container with fluid-sealing flow passagewayUS8888433Aug 19, 2005Nov 18, 2014Brooks Automation, Inc.Reduced capacity carrier and method of useUS8950624Dec 29, 2011Feb 10, 2015Giuseppe SaccaExternally operated alpha port system for use with a rapid transfer portUS9016501May 30, 2011Apr 28, 2015National Institute Of Advanced Industrial Science And TechnologyCoupling transfer systemUS20090159151 *Nov 18, 2008Jun 25, 2009Wang Sheng-HungGas filling apparatusUS20090225287 *Sep 15, 2008Sep 10, 2009Ming-Long ChiuReticle pod and method for keeping reticle clean and dryUSRE39241 *Nov 20, 2003Aug 22, 2006Entegris, Inc.Modular SMIF pod breather, adsorbent, and purge cartridgesDE4210960A1 *Apr 2, 1992Oct 7, 1993IbmEinrichtung und Verfahren zur Handhabung von Gegenst�ndenDE4326308C1 *Aug 5, 1993Oct 20, 1994Jenoptik Jena GmbhTransport device for magazines for holding disk-shaped objectsEP0562622A1 *Mar 26, 1993Sep 29, 1993Shinko Electric Co. Ltd.ID recognizing system in semiconductor manufacturing systemEP0565001A1 *Apr 2, 1993Oct 13, 1993Shinko Electric Co. Ltd.Closed container to be used in a clean roomEP0589814A1 *Sep 10, 1993Mar 30, 1994International Business Machines CorporationIsolation structure for contamination sensitive itemsEP1596430A1 *Apr 20, 2005Nov 16, 2005Miraial Co., Ltd.Apparatus and method for replacing a gas in a storage containerWO1990014273A1 *Apr 13, 1990Nov 29, 1990Asyst TechnologiesSealable transportable container having improved latch mechanismWO1992007759A1 *Sep 12, 1991May 14, 1992Asyst TechnologiesMethod and apparatus for transferring articles between two controlled environmentsWO1995030239A2 *Apr 28, 1995Nov 9, 1995Semitool IncSemiconductor processing system with wafer container docking and loading stationWO1996026874A1 *Feb 27, 1996Sep 6, 1996Asyst TechnologiesStandard mechanical interface integrated vacuum loadlock chamberWO1997002184A1 *Jul 3, 1996Jan 23, 1997Asyst TechnologiesSmif port interface adaptorWO1997013947A1Oct 13, 1995Apr 17, 1997Empak IncVacuum actuated mechanical latchWO1998002352A1 *Jul 12, 1997Jan 22, 1998Asyst TechnologiesTwo stage valve for smif podsWO1999004067A1 *Jul 10, 1998Jan 28, 1999Steag Ast Elektronik GmbhInflatable elastomeric element for rapid thermal processing (rtp) systemWO1999050577A1 *Mar 22, 1999Oct 7, 1999Asyst TechnologiesKinematic coupling compatible, passive interface sealWO2000032472A1Dec 1, 1999Jun 8, 2000Asyst TechnologiesPassively activated valve for carrier purgingWO2003070146A1 *Feb 7, 2003Aug 28, 2003Sacca GiuseppeContainer assembly for use with a rapid transfer port* Cited by examinerClassifications U.S. Classification141/98, 141/85, 414/608, 55/385.1, 141/383, 414/217, 414/940, 414/618, 414/217.1, 414/733, 414/939, 414/292, 414/414International ClassificationH01L21/677Cooperative ClassificationY10S414/14, Y10S414/139, H01L21/67772, H01L21/67393European ClassificationH01L21/677D6, H01L21/673K12ALegal EventsDateCodeEventDescriptionAug 24, 2007ASAssignmentOwner name: ASYST JAPAN, INC., JAPANFree format text: RELEASE BY SECURED PARTY;ASSIGNOR:BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:019733/0967Effective date: 20070727Owner name: ASYST TECHNOLOGIES, INC., CALIFORNIAFree format text: RELEASE BY SECURED PARTY;ASSIGNOR:BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:019733/0967Effective date: 20070727Owner name: ASYST TECHNOLOGIES, INC.,CALIFORNIAOwner name: ASYST JAPAN, INC.,JAPANOwner name: ASYST JAPAN, INC.,JAPANFree format text: RELEASE BY SECURED PARTY;ASSIGNOR:BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:019733/0967Effective date: 20070727Owner name: ASYST TECHNOLOGIES, INC.,CALIFORNIAFree format text: RELEASE BY SECURED PARTY;ASSIGNOR:BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:019733/0967Effective date: 20070727Aug 15, 2007ASAssignmentOwner name: KEYBANK NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGFree format text: SECURITY AGREEMENT;ASSIGNOR:ASYST TECHNOLOGIES, INC.;REEL/FRAME:019699/0165Effective date: 20070727Sep 27, 2006ASAssignmentOwner name: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT,WASOwner name: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT, WAFree format text: SECURITY AGREEMENT;ASSIGNORS:ASYST TECHNOLOGIES, INC.;ASYST JAPAN, INC.;REEL/FRAME:018303/0969Effective date: 20060713Owner name: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT,WASFree format text: SECURITY AGREEMENT;ASSIGNORS:ASYST TECHNOLOGIES, INC.;ASYST JAPAN, INC.;REEL/FRAME:018303/0969Effective date: 20060713Owner name: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT, WAFree format text: SECURITY AGREEMENT;ASSIGNORS:ASYST TECHNOLOGIES, INC.;ASYST JAPAN, INC.;REEL/FRAME:018303/0969Effective date: 20060713Aug 16, 1999FPAYFee paymentYear of fee payment: 12Apr 30, 1996FPExpired due to failure to pay maintenance feeEffective date: 19960221Feb 14, 1996FPAYFee paymentYear of fee payment: 8Feb 14, 1996SULPSurcharge for late paymentSep 26, 1995REMIMaintenance fee reminder mailedMay 23, 1991FPAYFee paymentYear of fee payment: 4Jun 19, 1986ASAssignmentOwner name: ASYST TECHNOLOGIES, 46309 WARM SPRINGS BOULEVARD,Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:PARIKH, MIHIR;BONORA, ANTHONY C.;REEL/FRAME:004581/0358Effective date: 19860611Owner name: ASYST TECHNOLOGIES,CALIFORNIAFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PARIKH, MIHIR;BONORA, ANTHONY C.;REEL/FRAME:004581/0358Owner name: ASYST TECHNOLOGIES,CALIFORNIAFree format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PARIKH, MIHIR;BONORA, ANTHONY C.;REEL/FRAME:004581/0358Effective date: 19860611RotateOriginal ImageGoogle Home - Sitemap - USPTO Bulk Downloads - Privacy Policy - Terms of Service - About Google Patents - Send FeedbackData provided by IFI CLAIMS Patent Services


text:
http://www.bbc.co.uk/news/world-asia-23529448?postId=116967992
It looks like a happy ending but it came about in the full glare of television cameras. The sleeping infant was one of two abandoned girls handed over during live broadcasts of "Amaan Ramzan", a blend of Islam and entertainment, which runs during the Muslim holy month of Ramadan.
The dapper host Dr Aamir Liaquat Hussain is already famous for giving away cars, motorbikes and household electronics.
Image caption Riaz Ud Din
It felt like... an angel came. She means more to me than my own soul
Riaz , Adoptive father
"We were already top of the ratings before we gave away a baby," said Dr Aamir, who describes himself as "truly a legend" on his website.
"These children are not a part of garbage, are not a part of trash, so we took these children from the garbage, from the trash, and delivered them to the needy people, the needy parents."
Her new father Riaz, a bearded civil engineer, told us Fatima was the answer to his mother's prayers. She died the day before the broadcast.
He and his wife Tanzeem waited 14 long years for a child. He refused to divorce her, as many advised, when she could not produce a child.
Image caption The civil engineer Riaz and his wife Tanzeem hold their newly-adopted child
Image caption Tanzeem Ud Din and another woman, Soraya Bilquis, savour motherhood
Image caption Dr Aamir Liaquat Hussain gives away cars and electrical goods on his TV shows
Image caption Fatima was left to die on a rubbish dump in Karachi
Image caption Fatima was handed over to her adoptive parents on the set of a TV show
Image caption Seema Majali
It's an insult to the baby and the parents. It should have been done quietly
Seema Jamali, Sindh province child welfare
But child welfare advocates fear that other TV shows will copy the baby giveaway. They also worry that the lack of confidentiality could expose the children and their families to teasing and stigma in the future.
"The baby was given away the same way as a gift," said Seema Jamali, assistant director of child welfare for the Sindh provincial government.
"Though it was good to find parents for her, the baby was given like a car, laptop, or motorcycle. It's an insult to the baby and the parents. It should have been done quietly."
It was far from quiet, but it was quick. Both couples were vetted by a private charity, the Chhipa Welfare Association, in less than two weeks. That's a typical time frame here. Checks were carried out on their incomes, medical records, and homes, and there were investigations with the police, and in their communities.
But here in Pakistan there has been no public outcry about the fact that babies were given away on a TV show. Many are glad that they have a new start in life.
Their stories could have ended very differently. More than 300 dead babies are found every year in Karachi alone by Pakistan's largest welfare organisation, the Edhi Foundation. In a 10-day period in July they found 23 tiny bodies. Some had been suffocated.
At their spotless and welcoming home, Fatima's parents keep watch over their precious gift. They take turns to kiss her forehead and arrange her blanket.
"I have hardly had more than two hours' sleep a night since she came," said Riaz, smiling broadly. "We hope she will grow up to be a religious scholar, or maybe an engineer like me." As he spoke Fatima yawned, stirred, and clenched a little fist.
Video Senior Pakistani Taliban leader 'shocked' by Malala attack
Women shot in Gilgit-Baltistan 'honour killings'

type: global

value: This website is the BBC's online service. It is a large network of websites including such high-profile sites as BBC News and Sport, the on-demand video and radio services co-branded BBC iPlayer, the children's sites CBBC and CBeebies, and learning services such as Bitesize.


text:
Words containing aucariaceae | Words that contain aucariaceae
Words containing aucariaceae | Words that contain aucariaceae http://www.thefreedictionary.com/words-containing-aucariaceaePrinter Friendly
9,921,771,588 visitors served
Words containing aucariaceae
Found 1 words containing aucariaceae. Browse our Scrabble Word Finder, Words With Friends cheat dictionary, and WordHub word solver to find words that contain aucariaceae. Or use our Unscramble word solver to find your best possible play! Related: Words that end in aucariaceae
13 letter words containing aucariaceaeSee also13 letter words containing aucariaceaearaucariaceaeSee also:2-letter words with ZWords that start with uWords that start with jWords with the letter zWords that end in qWords that start with aWords containing aucariaceWords containing aucariaceae

value: This website is an American online dictionary and encyclopedia that aggregates information from various sources.


text:
Cheap Flights to Brooks, Alberta | Expedia
Flights to Brooks, Alberta from FlightsHotelsPackage Deals (Flight + Hotel)Search Flights Please correct the errors below.RoundtripOne wayMultiple destinationsLeaving fromGoing toDepartingReturningAdults (18+)123456Children (0 - 17)0123456Flight 1Flying fromFlying toDepartingFlight 2Flying fromFlying toDepartingFlight 3Flying fromFlying toDepartingFlight 4Flying fromFlying toDepartingFlight 5Flying fromFlying toDepartingAdults (18+)123456Children (0 - 17)0123456Child 1 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Child 2 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Child 3 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Child 4 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Child 5 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Child 6 Age <1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Children under 2 must either sit in laps or in seats.In lapIn seat Advanced options Advanced optionsNonstopRefundable flightPreferred airline No preference Adria Airways Aegean Aer Lingus Aeroflot-Russian Airlines AeroGal Aerolineas Argentinas Aeromar Airlines Aeromexico Air Astana Air Baltic Air Botswana Air Burkina Air Canada Air China Air Choice One Air Europa Air France Air India Air Madagascar Air Malta Air Mauritius Air Moldova Air New Zealand Air Onix Air Serbia Air Tahiti Nui Air Transat AirAsia with baggage airberlin Airlines of Papua New Guinea Alaska Airlines Alitalia All Nippon Airways American Airlines Aserca Airlines Asiana Airlines Austrian Airlines Avianca Avior Airlines Azerbaijan Airlines Azul Boliviana De Aviacion Boutique Air British Airways Brussels Airlines Cape Air Caribbean Airlines Cathay Pacific Cayman Airways Cemair China Airlines China Eastern Airlines China Southern Airlines COMAIR LTD. Condor Copa Corsair Czech Airlines Delta easyJet Egyptair EL AL Israel Airlines Ellinair Emirates Ethiad Regional Ethiopian Airlines Etihad Airways Eurowings EVA Airways Fiji Airways Finnair Firefly Flybe Frontier Airlines Garuda Indonesia Germanwings GOL Linhas Aereas Inteligentes Gulf Air Hainan Airlines Hawaiian Airlines Hong Kong Airlines Iberia Icelandair Insel Air Aruba Insel Air International interCaribbean Airways Interjet Japan Airlines Jet Airways Jetairfly JetBlue Airways Kenya Airways KLM Korean Air LACSA Lao Airlines LATAM Airlines Argentina LATAM Airlines Brasil LATAM Airlines Ecuador LATAM Airlines Group LATAM Airlines Peru Liat LOT-Polish Airlines Lufthansa Luxair Malaysia Airlines Maya Island Air Meridiana fly MIAT-Mongolian Airlines Middle East Airlines Myanmar Airways International Nepal Airlines Niki Norwegian Air Shuttle Oman Air PAN AM World Airways Dominicana Pegasus Asia PenAir Peruvian Airlines Philippine Airlines Plus Ultra Lineas Aereas S. A. Porter Airlines PrecisionAir Proflight Zambia Qantas Airways Qatar Airways Royal Air Maroc Royal Brunei Airlines Royal Jordanian SAS SATA International-Azores Airlines S.A. Saudi Arabian Airlines Seaborne Airlines Senegal Airlines Shandong Airlines Silver Airways Singapore Airlines Sky Airlines Solomon Airlines South African Airways Southern Airways Spirit Airlines SriLankan Airlines Sun Air Express Surinam Airways Swiss International Air Lines TAAG Angola Airlines TACA Airlines TACV-Cabo Verde Airlines Tame TAP Portugal Tarom-Romanian Air Transport Thai Airways International Thomas Cook Airlines Tigerair Australia with Bag Tigerair Singapore with Bag Tigerair Taiwan Tigerair Taiwan without bag Tradewind Aviation Transaero Airlines Tropic Air Turkish Airlines United Ural Airlines Utair Aviation Uzbekistan Airways Vietnam Airlines Virgin America Virgin Atlantic Virgin Australia Vision Airlines Vistara VivaAerobus Volaris WestJet Windward Island Airways International Wow Air Xiamen Airlines XL Airways Preferred class First Class Business Economy Premium Economy Search Search 400 airlines and 282,000
https://www.expedia.com/Cheap-Flights-To-Brooks.d56816.Travel-Guide-Flights
Expedia.com • Flights • North America • Canada • Alberta • Medicine Hat • Flights to Brooks
Brooks FlightsIf you're looking for cheap flights to Brooks, the number of options and simplicity of booking through Expedia simply won't be beat. Search through all of our flights and be sure that you're getting the best price guaranteed! Combine your Brooks flight with lodging accommodations or even a rental car for a special deal designed to help you save even more money!For example, we have found thatpeople who reserve a hotel and flight together can save up to $570!* Likewise, just by combining the air travel and rental car together in a single reservation, you can save up to 60%!**Whether you're just planning on exploring the local area or expect to see all of Medicine Hat, we hope you enjoy your Alberta trip.. Read more Get up to 100% off your flight to Brooks when booking a Flight + HotelFlying to Brooks? Explore Brooks with Expedia's Travel Guides to find the best hotels, vacation packages, car rental deals and more!**Savings based on all vacation package bookings with Flight + Car on Expedia.com from April 2015 through September 2015, as compared to price of the same components booked separately. Savings will vary based on origin/destination, length of trip, stay dates and selected travel supplier(s). Savings not available on all cars.Brooks hotelsBrooks car rentalsBrooks vacation packages
Gillette Best Western|
Brea Hilton Worldwide|
Garmisch Partenkirchen Dorint Hotels Resorts|

value: This website is an online travel agency owned by Expedia Group, an American online travel shopping company based in Seattle.


text:
In the Pond: A Lift-The-Flap Book. [Editor, Christiane Gunzi] (Whos Hiding?): 9781906572907 - AbeBooks.com
In the Pond: A Lift-The-Flap Book. [Editor, Christiane Gunzi] (Whos Hiding?)
ISBN 10: 1906572909 / ISBN 13: 9781906572907
In the Pond: A Lift-The-Flap Book. [Editor, Christiane Gunzi] (Whos Hiding?). Bookseller Inventory #
Title: In the Pond: A Lift-The-Flap Book. [Editor, ...
1. In the Pond: A Lift-The-Flap Book. [Editor, Christiane Gunzi] (Who's Hiding?)
Published by Picthall & Gunzi
ISBN 10: 1906572909 ISBN 13: 9781906572907
Book Description Picthall & Gunzi. Hardcover. Book Condition: Very Good. 1906572909 Books shipped daily. Professional seller. Bookseller Inventory # Z1906572909Z2
2. WHOS HIDING IN THE POND
Book Description Hardback. Book Condition: Very Good. The book has been read, but is in excellent condition. Pages are intact and not marred by notes or highlighting. The spine remains undamaged. Bookseller Inventory # GOR005428772
3. WHOS HIDING IN THE POND
Book Description Hardback. Book Condition: Good. The book has been read but remains in clean condition. All pages are intact and the cover is intact. Some minor wear to the spine. Bookseller Inventory # GOR004296796
4. In the Pond: A Lift-The-Flap Book. [Editor, Christiane Gunzi] (Who's Hiding?)
Published by Picthall & Gunzi (2011)
Book Description Picthall & Gunzi, 2011. Hardcover. Book Condition: Used: Good. Bookseller Inventory # SONG1906572909

value: This website is an e-commerce global online marketplace with seven websites that offer books, fine art, and collectables from sellers in over 50 countries. Launched in 1996, it specialises in used, rare and out-of-print books.


text:
Chiropractic Centers - Hanover Park, IL | Groupon
Select Location Elk Grove Village Lake in the Hills West Dundee Hanover Park Select Number of Visits One Three
Elk Grove Village: Dr Eldon Meeks
Lake in the Hills: Dr Harry Patel
West Dundee: Dr Craig Oswald
Hanover Park: Dr Steve Harris

value: This website is an American global e-commerce marketplace connecting subscribers with local merchants by offering activities, travel, goods and services in 15 countries. Based in Chicago, Groupon was launched there in November 2008, launching soon after in Boston, New York City and Toronto.


text:
Flower Earrings Sterling Silver Swarovski Pearls Plumeria | Etsy
$15.25 $16.95+
Select a color ivory Black Brown White light pink rose pink Rose gold Gold light green dark green light champagne dark champagne lavender iridescent purple light blue night blue light grey dark grey peach maroon burgundy bordeaux turquoise pearlescent white iridescent blue lapis pink coral red coral
Materials: sterling silver charm, sterling silver findings
A lovely plumeria sterling silver flower earrings with Swarovski pearl.
Total length measures 1.5" long.
All components are made with STERLING SILVER.
https://www.etsy.com/ca/listing/286483711/charm-bracelet-sterling
https://www.etsy.com/ca/listing/523832943/flower-necklace
Plumeria flower earrings sterling silver with Swarovski pearl dangle earrings wedding bridal party gift choice of pearl color ivory white
Painted wooden crafts Indonesia plumeria Flower Earrings
Sterling silver Flower Necklace, Tiny Plumeria Flower Necklace, Flower girl Gift, Dainty Necklace, Everyday Necklace, Minimalist,
Plumeria flower earrings Long Stem Earrings, Plumeria earrings sterling silver earrings gift jewelry Dangle earrings stud earrings E-091
Plumeria Flower Custom Stencil
Plumeria flower pens
20mm fuscia Orange plumeria flower

value: This website is an American e-commerce company focused on handmade or vintage items and craft supplies.


text:
Electronics > Refine Price $ to $ Go Top brands Samsung VIZIO Apple HP Store availability Sort Best sellers Price: low to high Price: high to low Highest rating New Best Seller $14.94 Was $15.97 Save $1.03 Logitech Wireless Mouse M185 w/ USB Nano Wireless Receiver, Black 4.5 stars (708) ratings Free shipping on orders over $50 Free store pickup today Rollback $63.99 Logitech Z506 Speaker System 4.0 stars (45) ratings Free shipping Free store pickup today Rollback $20.99 Was $29.88 Save $8.89 Logitech M510 Wireless Mouse 4.5 stars (187) ratings Free shipping on orders over $50 Free store pickup today Rollback $42.18 Was $59.88 Save $17.70 Logitech 960-000733 Hd Webcam C615 4.5 stars (73) ratings Free shipping on orders over $50 Free store pickup today Rollback $47.01 Was $59.88 Save $12.87 Logitech Wireless Headset H600 3.5 stars (70) ratings Free shipping on orders over $50 Free store pickup today Rollback Free Spirited
$17.97 Was $19.97 Save $2.00 Logitech M325 Wireless Mouse 4.0 stars (25) ratings Free shipping on orders over $50 Free store pickup Special Buy $119.99 Brother DS-620 Mobile Color Page Scanner 4.0 stars (76) ratings Free shipping Free store pickup Rollback $6.00 Brother 3015 Lift Off Correction Tape 5.0 stars (2) ratings Free shipping on orders over $50 Free store pickup Rollback $39.88 Was $44.88 Save $5.00 Logitech 960-000715 Hd Webcam C525 720P Hd Auto focus 4.0 stars (20) ratings Free shipping on orders over $50 Free store pickup today Reduced Price $36.95 List price $69.99 Save $33.04 Refurbished Logitech Wireless All-in-One Keyboard w/ USB Unifying Nano Receiver - TK820 5.0 stars (1) ratings Sold & Shipped by Altatac Free shipping Rollback $16.48 Brother LC79Y Yellow Ink Cartridge 5.0 stars (1) ratings Free shipping on orders over $50 Free store pickup Rollback $136.32 Was $152.47 Save $16.15 Brother 250 Sheets Lower Paper Tray Free shipping Free store pickup Rollback $183.28 Was $195.79 Save $12.51 Brother Lower Paper Tray Free shipping Free store pickup Rollback $380.00 Was $443.4 Save $63.40 Brother PT-9800PCN P-touch Thermal Transfer Printer Free shipping Free store pickup Rollback $19.00 Was $21.11 Save $2.11 Brother Auto Adapter Free shipping on orders over $50 Free store pickup 1 Showing 15 of 15 results Departments Computers Cameras & Camcorders Audio Portable Audio Phones & Accessories Home Audio & Theater Shipping & Pickup Show all Ship to Home FREE Pickup FREE Pickup Today Special Offers Rollback Special Buy Clearance Reduced Price New As Advertised Price Shown at Cart See more special offers Brand Samsung VIZIO Apple HP LG Sony Dell RCA Canon Acer Microsoft Toshiba Garmin Hisense Sceptre Lenovo Emerson Straight Talk Element Pyle See more brands Price $ to $ Go $0 - $50 $50 - $100 $100 - $150 $150 - $200 $200 - $250 $250 - $300 $300 - $350 $350 - $400 $400 - $500 $500 - $700 $700+ See more prices Retailer Walmart.com Altatac Customer Rating 4.0 stars & Up 3.0 stars & Up Popular in Electronics Brother Ink Cartridges Gopro Hero 3 Flash Drive Duplicators Single Color Printer Ink Cartridges Amp Wiring Kits Canon Inks USB's Camera Cases Compute- app-4983975-10-88396412, DC- prod-dfw1, ENV- prod-a, Ver- 40.0.0, SHA- 99e97d1a1f9fc08d509d0fdf443b4323885a23af, Log- 96a5926-245d-154f48969d6000 Site Information Be the first to save! Email Address Sign up Privacy policy Stay connected Mobile apps Help Feedback MoneyCenter Privacy & Security CA Privacy Rights Terms of Use Financial Services Walmart MoneyCenter Walmart Credit Card Apply Now Manage Card Account Product Care Plans Walmart Pay Get to Know Us About Walmart.com Corporate Suppliers Marketplace Careers @Walmartlabs Walmart.com Terms of Use About Our Ads Affiliate Program CA Privacy Rights Privacy & Security Customer Service Returns Policy Product Recalls Int'l Customers Tax Exempt Program Contact Us Feedback In the Spotlight Expand Baby Cribs Strollers Diapers Baby Feeding Car Seats Expand Electronics Cut the Cable Computers TVs iPad & Tablets Expand Fitness Exercise Machines Vitamins Ellipticals Treadmills Fitbit Expand Spring Cleaning Storage Containers Garage Storage Storage Sheds Expand International Sites Argentina Brazil Canada Chile China Japan Mexico United Kingdom © Walmart Stores, Inc. To ensure we’re able to help you as best we can, please include your reference number: Ref:

value: This website is an American multinational retail corporation that operates a chain of hypermarkets , discount department stores, and grocery stores from the United States, headquartered in Bentonville, Arkansas.


text:
Patent US4786229 - Document storage and retrieval apparatus and method - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More »Advanced Patent Search | Sign inAdvanced Patent SearchPatentsA document and storage retrieval system including a plurality of containers, each having machine readable identifying indicia thereon. The containers are positioned by automatic palletizing apparatus on each of a plurality of pallets. The identity of the containers on each pallet is correlated with a...http://www.google.com/patents/US4786229?utm_source=gb-gplus-sharePatent US4786229 - Document storage and retrieval apparatus and methodPublication numberUS4786229 APublication typeGrantApplication numberUS 06/857,723Publication dateNov 22, 1988Filing dateApr 30, 1986Priority dateApr 30, 1986Fee statusLapsedPublication number06857723, 857723, US 4786229 A, US 4786229A, US-A-4786229, US4786229 A, US4786229AInventorsThomas R. HendersonOriginal AssigneeHenderson Thomas RPatent Citations (13), Non-Patent Citations (2), Referenced by (39), Classifications (18), Legal Events (4) External Links: USPTO, USPTO Assignment, EspacenetDocument storage and retrieval apparatus and methodUS 4786229 AAbstract A document and storage retrieval system including a plurality of containers, each having machine readable identifying indicia thereon. The containers are positioned by automatic palletizing apparatus on each of a plurality of pallets. The identity of the containers on each pallet is correlated with a storage location address assigned by a controller. Additionally identifying indicia for the pallet is preferably correlated to the address. On retrieval of a selected container, the pallet is retrieved, all of the containers are removed from the pallet, the selected container is sorted from the remaining containers, and all of the remaining containers are repalletized and reassigned a new address in the storage volume. The address or location of containers in the storage volume is dynamically changing, but the controller for the system always has a correlation of container identities and storage location addresses.
Since the document storage and retrieval system of the present invention includes automated container handling equipment, it is preferable that the system be employed with containers 21 which are all of substantially the same size. There are, however, many situations which require the storing of documents or other articles which cannot be stored in a standard letter/legal size container 21, and accordingly the document storage and retrieval system of the present invention contemplates use of non-standard containers. Thus, 16 16 containers also can be readily employed with the system of the present invention.
Container 21 further preferably includes a bar code 37 positioned on side wall 38 opposite side wall 31 on which one of the control slips is mounted. Side wall 38 is shown in FIG. 1 in phantom in a moved position, as is bar code 37. Bar code 37 preferably is a Uniform Product Counsel (UPC) bar code which may be permanently affixed to container 21, for example, by printing the same directly on the container. Bar code 37 indicates whether or not container 21 is a standard size container, in this case 17 and bar code 37 is used in a container sorting process which also is described in more detail below.
B. PALLETS The document storage and retrieval system of the present invention is based upon placing a plurality of containers 21 on a common carrier means, such as a forklift pallet. Systems in which an individual container is stored in its individual volume or location require storage structures which are relatively complex and/or an undesirably active and complex container conveying system. Accordingly, the apparatus and method of the present invention employ a system in which a plurality of containers 21 are positioned on pallet means 41 in an array dictated by the size of the containers. For a standard 17 containers may be positioned as shown in FIG. 2, with 11 containers positioned in a layer on a 54 inch by 48 inch pallet. Pallet 41 is preferably a double-face, non-reversible forklift pallet with a three-fourth inch solid plywood upper face 42 for support of containers 21 thereon and longitudinally extending members 4 which define longitudinally extending spaces for receipt of the tines of a forklift truck therebetween. The bottom of pallet 41 may have transverse members and/or panels (not shown) which permit conveying and are spaced to interlock with support frame members or racks in the storage structure. Such pallet constructions are well known.
Patent CitationsCited PatentFiling datePublication dateApplicantTitleUS3351219 *Apr 9, 1965Nov 7, 1967Ruderfer Walter AWarehousing order selection systemUS3434604 *May 12, 1966Mar 25, 1969Bahlsen WernerMaterial handling systemUS3482712 *Oct 16, 1967Dec 9, 1969Sperry Rand CorpVerifier for an article filing systemUS3526326 *Mar 4, 1968Sep 1, 1970Supreme Equip & SystStorage retrieval apparatus with positional control meansUS3531002 *Jul 15, 1969Sep 29, 1970Triax CoAutomatic storage apparatusUS3536194 *Feb 27, 1967Oct 27, 1970Mosler Safe CoDocument retrieval and handling systemUS3866767 *Feb 15, 1973Feb 18, 1975Rapistan IncMobile tier picking apparatus for a warehousing systemUS4219296 *Mar 10, 1978Aug 26, 1980Itoki Kosakusho Co., Ltd.Automatic storage and retrieval apparatus for individual file foldersUS4285623 *Mar 17, 1980Aug 25, 1981Infodetics CorporationCombined transport and gate assembly for document storage and retrieval systemsUS4362454 *May 14, 1981Dec 7, 1982Rudolf KripzakHandling system for workpiecesUS4669047 *Mar 20, 1984May 26, 1987Clark Equipment CompanyAutomated parts supply systemUS4678390 *Mar 26, 1986Jul 7, 1987Societe Anonyme Redoute CatalogueAutomated self-powered material handling truckJPS5427177A * Title not available* Cited by examinerNon-Patent CitationsReference1 *Mechanical Handling Jun. 1969 pp. 104 and 105.2Mechanical Handling-Jun. 1969-pp. 104 and 105.* Cited by examinerReferenced byCiting PatentFiling datePublication dateApplicantTitleUS5006996 *Mar 20, 1989Apr 9, 1991Fuji Electric Co., Ltd.System of conveying, storing, retrieving and distributing articles of manufactureUS5010997 *Sep 13, 1988Apr 30, 1991Kabushiki Kaisha ToshibaTransport sytstemUS5113349 *Jul 12, 1989May 12, 1992Fuji Electric Co. Ltd.Method and system for storing/removing and distributing articles of manufactureUS5147176 *Jun 25, 1990Sep 15, 1992Keuro Maschinebau Gmbh & Co. KgMethod of handling goods, and more particularly rod, rail or plate goods in box pallets, and goods handling systemUS5211528 *Jan 15, 1992May 18, 1993Mitsubishi Denki Kabushiki KaishaIndustrial robot apparatusUS5252024 *Nov 4, 1991Oct 12, 1993General Motors CorporationTransfer method for various sizes of assembliesUS5260694 *Jan 10, 1992Nov 9, 1993Ndc Automation, Inc.Automatic article tracking system for manually operated delivery systemUS5272752 *Mar 16, 1992Dec 21, 1993Scientific-Atlanta, Inc.Authorization code lockout mechanism for preventing unauthorized reception of transmitted dataUS5291395 *Feb 7, 1991Mar 1, 1994Max AbecassisWallcoverings storage and retrieval systemUS5303214 *Jan 3, 1992Apr 12, 1994International Business Machines CorporationMulti-media-type automatic librariesUS5379229 *Jun 18, 1992Jan 3, 1995Communications Test Design, Inc.Automated storage and retrieval systemUS5468110 *Aug 25, 1994Nov 21, 1995Automated Healthcare, Inc.Automated system for selecting packages from a storage areaUS5501571 *Jan 21, 1993Mar 26, 1996International Business Machines CorporationAutomated palletizing systemUS5550745 *Jun 30, 1994Aug 27, 1996Accu-Sort Systems, Inc.Moveable label printer-applicator/conveyor loader assemblyUS5593267 *May 25, 1995Jan 14, 1997Automated Healthcare, Inc.Automated system for selecting and delivering packages from a storage areaUS5880443 *Jan 7, 1997Mar 9, 1999Automated HealthcareAutomated system for selecting packages from a cylindrical storage areaUS5908283 *Nov 26, 1996Jun 1, 1999United Parcel Service Of Americia, Inc.Method and apparatus for palletizing packages of random size and weightUS5930144 *Jul 22, 1997Jul 27, 1999Ricoh Company, Ltd.Parts supply systemUS5940305 *Jun 7, 1996Aug 17, 1999Accu-Sort Systems, Inc.Moveable label printer-applicator/conveyor loader assemblyUS6120241 *Mar 15, 1999Sep 19, 2000United Parcel Service Of America, Inc.Apparatus for selecting package from a line of accumulated packagesUS6275743 *Jun 18, 1999Aug 14, 2001Ricoh Company, Ltd.Parts supply systemUS6286656Mar 15, 1999Sep 11, 2001United Parcel Service Of America, Inc.Apparatus for measuring length of accumulated packagesUS6290454Mar 15, 1999Sep 18, 2001United Parcel Service Of America Inc.Apparatus for gripping parcelsUS6325586Dec 8, 1999Dec 4, 2001Protosight, Inc.Automated storage and retrieval systemUS6543692 *Aug 31, 2000Apr 8, 2003Gerhard NellhausSchema for identification of solid form drugsUS6677548 *Aug 10, 2001Jan 13, 2004Mts Modulare Transport Systeme GmbhSorting method, sorting installation and sorting systemUS6699007Aug 10, 2001Mar 2, 2004United Parcel Service Of America, Inc.Method and apparatus for palletizing packages of random size and weightUS7184855Apr 30, 2004Feb 27, 2007Stingel Iii Frederick JAutomated container storage and delivery systemUS7210894Dec 29, 2003May 1, 2007United Parcel Service Of America, Inc.Method and apparatus for palletizing packages of random size and weightUS7221998Jan 21, 2005May 22, 2007David BrustDetermining pallet case configurations for placement by a robotUS7243002 *Nov 17, 2004Jul 10, 2007Translogic CorporationSystem and method for carrier identification in a pneumatic tube systemUS7591630 *Aug 28, 2004Sep 22, 2009Casepick Systems, LlcMaterials-handling system using autonomous transfer and transport vehiclesUS7953515Feb 6, 2008May 31, 2011Translogic CorporationSystem and method for carrier identification in a pneumatic tube systemUS8000837Sep 28, 2005Aug 16, 2011J&L Group International, LlcProgrammable load forming system, components thereof, and methods of useUS8264697 *Jul 10, 2008Sep 11, 2012Intelligrated Headquarters, LlcObject detection deviceUS8317432Oct 7, 2009Nov 27, 2012Translogic CorporationAir valve pneumatic tube carrier systemUS8382401Oct 7, 2009Feb 26, 2013Translogic CorporationVariable diameter pneumatic tube brakeUS8425173Apr 9, 2010Apr 23, 2013Symbotic LlcAutonomous transports for storage and retrieval systemsUS8447427Apr 15, 2011May 21, 2013Translogic CorporationSystem and method for carrier identification in a pneumatic tube system* Cited by examinerClassifications U.S. Classification414/801, 414/274, 209/630, 414/807, 414/273, 700/215, 414/799, 209/659, 414/286, 414/796.9International ClassificationB65G1/137, G06K17/00, B65G47/10Cooperative ClassificationG06K2017/0051, B65G1/1371, G06K17/0003European ClassificationB65G1/137B, G06K17/00BLegal EventsDateCodeEventDescriptionFeb 2, 1993FPExpired due to failure to pay maintenance feeEffective date: 19921122Nov 22, 1992LAPSLapse for failure to pay maintenance feesJun 25, 1992REMIMaintenance fee reminder mailedMar 28, 1989CCCertificate of correctionRotateOriginal ImageGoogle Home - Sitemap - USPTO Bulk Downloads - Privacy Policy - Terms of Service - About Google Patents - Send FeedbackData provided by IFI CLAIMS Patent Services©2012 Google

value: This website is a search engine provided by Google. Handling over 3.5 billion searches per day, it has a 92% share of the global search engine market.